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Direct micropatterning of high dielectric BaTiO3 films by laser-induced pyrolysis with a nano-crystalline seeding technique |
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| Authors: | Yoshio Kobayashi Kenshi Miyajima Akira Watanabe Takao Miwa |
| Institution: | a Department of Chemical Engineering, Graduate School of Engineering, Tohoku University, 6-6-07 Aoba, Aramaki-aza, Aoba-ku, Sendai 980-8579, Japan b Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan c Hitachi Research Laboratory, Hitachi Ltd., 7-1-1 Omika-cho, Hitachi, Ibaraki 319-1292, Japan |
| Abstract: | A direct patterning method of dielectric BaTiO3 (BT) films is proposed, which applies laser-induced pyrolysis in combination with nano-crystalline seeding technique. A precursor solution of a BT complex alkoxide containing BT nano-crystalline particles with polyvinylpyrollidone (PVP) as dispersion stabilizer was spin-coated on Pt substrate. An Ar+ laser beam was focused and scanned on spin-coated BT films, which induced pyrolysis and crystallization of the films with spatial selectivity. Micropatterns were obtained by striping laser-unirradiated regions on the films with HCl aqueous solution. Raman spectra of the micropattern confirmed that the structures were tetragonal crystalline BT. Clear micropatterns with a line width of ca. 3 μm and an interval of 5 μm were formed at PVP concentrations of 25 and 50 kg/m3. The dielectric constant and dissipation factor of the film fabricated at a laser energy density of 27 MW/cm2 and a scanning speed of 25 μm/s attained 76.2 and 0.07, respectively, for a measurement frequency of 100 kHz. |
| Keywords: | Micropattern Laser-induced pyrolysis BaTiO3 Crystallization Dielectric properties Raman spectroscopy |
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