|
|||||
|
|
TiO2 nanoparticle thin film deposition by matrix assisted pulsed laser evaporation for sensing applications |
|
| Authors: | A.P. Caricato G. Ciccarella R. Rella J. Spadavecchia T. Tunno |
| Affiliation: | a Universita’ del Salento, Dipartimento di Fisica, gruppo L3, Via Arnesano, 73100 Lecce, Italy b Istituto per la Microelettronica ed i Microsistemi (IMM) CNR, Via Monteroni, 73100 Lecce, Italy c Universita’ del Salento, Dipartimento di Ingegneria dell’Innovazione, Via Arnesano, 73100 Lecce, Italy |
| Abstract: | The MAPLE technique has been used for the deposition of nanostructured titania (TiO2) nanoparticles thin films to be used for gas sensors applications. An aqueous solution of TiO2 nanoparticles, synthesised by a novel chemical route, was frozen at liquid nitrogen temperature and irradiated with a pulsed ArF excimer laser in a vacuum chamber. A uniform distribution of TiO2 nanoparticles with an average size of about 10 nm was deposited on Si and interdigitated Al2O3 substrates as demonstrated by high resolution scanning electron microscopy-field emission gun inspection (SEM-FEG). Energy dispersive X-ray (EDX) analysis revealed the presence of only the titanium and oxygen signals and FTIR (Fourier transform infra-red) revealed the TiO2 characteristic composition and bond. A comparison with a spin coated thin film obtained from the same solution of TiO2 nanoparticles is reported. The sensing properties of the films deposited on interdigitated substrates were investigated, too. |
| Keywords: | TiO2 nanoparticles SEM-FEG EDX Sensor |
| 本文献已被 ScienceDirect 等数据库收录！ | |