宽离子能量检测范围垂直引入反射式飞行时间质谱仪的研制

本实验室研制了国内首台宽离子能量检测范围飞行时间质谱仪。仪器采用紧凑式电子轰击源设计,配合离子透镜系统有效的调制离子流,飞行时间质量分析器采用了离子垂直引入式,双场加速和双场反射以及大尺寸MCP检测装置设计。仪器单离子信号半峰宽约2 ns,仪器分辨率优于1600FWHM,检测实际样品质量范围为1~127 amu(仪器理论质量检测上限优于800 amu),可检测离子能量范围优于2个数量级(3~140 eV)。若该TOF质量分析器与短瞬高压脉冲放电离子源耦合联用,可广泛应用于高能离子束的快速检测,如真空阴极放电对制备薄膜、离子注入材料的表征,导电材料的离子电荷态分布以及离子扩散速度的测定等。

Development of Orthogonal Acceleration Time-of-Flight Mass Spectrometer for Detection of Ions with Wide Energies Distribution

A time-of-flight mass spectrometer was developed for the detection of ions with wide energies distribution. The instrument associated with an electron impact source. The ions flow was effectively modulated by a lens system and then introduced into the time-of-flight mass analyzer which included a dual field of acceleration region, a reflection region, and a large-size micro channel plate (MCP) detection device. The characteristics of the spectrometer were as follows: half-peak width of single ion signal was about 2 ns, resolution of the instrument was better than 1600 FWHM, mass range of actual samples was 1–127 amu in comparison with the theoretical mass detection limit of higher than 800 amu, and ion energy detection range was better than two orders of magnitude (3–140 eV). If coupled with short-instantaneous pulse discharge ion source, the TOF mass analyzer would be used in the field of rapid detection of high-energy ion beam, such as vacuum cathode discharge preparation of thin films, ion injection material characterization, ion charge state distribution of conductive material and determination of ion diffusion speed.