Fabrication of a curved linear grating by using a laser direct writer system |
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| Authors: | Hongxin Zhang Zhenwu Lu Fengyou Li |
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| Affiliation: | a State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, PR China
b Graduate School of the Chinese Academy of Sciences, Beijing 100039, PR China |
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| Abstract: | We present the lithography technique to fabricate a curved linear grating by using a Cartesian coordinates laser direct writer (LDW) system. The grating with the period of 15 μm is made on the convex lens surface. This is a new application of the LDW system. After the chromium coating and the photoresist removing procedures, a convex reflecting grating is obtained. |
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| Keywords: | Laser direct writer Curved linear grating Lithography technique |
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