|
|||||
|
|
Differential algebraic method for arbitrary-order chromatic aberration analysis of electrostatic lenses |
|
| Authors: | Min Cheng Shanfang Zhou Tiantong Tang |
| Affiliation: | a School of Electrical & Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore b Department of Assets, Linyi Teachers University, 276005, China c School of Electronics and Information Engineering, Xi’an Jiaotong University, 710049, China |
| Abstract: | In this paper, differential algebra is applied to calculate arbitrary high-order chromatic aberrations of electrostatic electron lenses. Expressions of differential algebraic form of high-order combined chromatic aberration coefficients are obtained and arbitrary-order chromatic aberrations can be calculated numerically. As an example, a typical Schiske's electrostatic lens has been studied. All the first- to third-order chromatic aberration coefficients of the lens have been calculated, and the pattern of the first-order chromatic aberration has been given as well. |
| Keywords: | Differential algebra Chromatic aberration analysis Electrostatic lenses |
| 本文献已被 ScienceDirect 等数据库收录！ | |