Movement measurement with a grating interferometer using sinusoidal phase-modulation |
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Authors: | Hai Huan Osami Sasaki |
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Institution: | a Graduate School of Science and Technology, Niigata University, 8050, Ikarashi 2-no-cho, Niigata-shi 950-2181, Japan b Faculty of Engineering, Niigata University, Niigata-shi 950-2181, Japan |
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Abstract: | Movements of a surface profile are measured with a two-grating interferometer using sinusoidal phase-modulation. Since sinusoidal phase-modulating (SPM) interferometry can record a phase change due to the movement of an object in the interference signal, the SPM interferometer is suitable for measuring the movement of the object. Some experiments show that the two-grating interferometer can measure a sinusoidal vibration with amplitude of several tens of microns and a step movement with a magnitude of several microns. |
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Keywords: | Movement measurement Grating interferometer Sinusoidal phase-modulation |
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