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Fabrication of blazed gratings by area-coded effective medium structures |
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| Authors: | Henna Elfströ m,Markku Kuittinen,Bernd H. Kleemann,Ralf Arnold |
| Affiliation: | a University of Joensuu, Department of Physics, Yliopistokatu 7, P.O. Box 111, FI-80101 Joensuu, Finland b Corporate Research and Technology, Carl Zeiss AG, D-73446 Oberkochen, Germany c Lithography Optics Division, Carl Zeiss SMT AG, D-73446 Oberkochen, Germany |
| Abstract: | Area-coded effective medium structures (ACES) are a recently presented novel type of diffractive structure. Because of their higher stability compared to 2D binary blazed gratings, they have the potential of a broader use in micro-optics applications. The first fabrication with electron-beam lithography validate the theoretical model of blazed ACES. The measured diffraction efficiencies are in very good agreement with the values obtained from rigorous electromagnetic analysis. |
| Keywords: | 42.25.Fx 42.79.Dj |
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