微空心阴极放电的Monte Carlo模拟研究

基于MATLAB与VC++混合语言，采用Monte Carlo模拟对高气压下亚毫米级微空心阴极放电（MHCD）中电子的运动过程进行了研究，计算出不同气压下的稳态时场向电子密度分布，电子能量分布以及对各种碰撞的统计等.分析表明：高气压下微空心阴极放电更能反映空心阴极效应——“来回振荡”的本质.通过模拟得到，电子在阴极间来回振荡的过程中，仍以前向散射为主.随着气压的升高，侧向散射效应逐渐体现出来. 关键词： 微空心阴极 Monte Carlo 负辉区 碰撞截面

Monte Carlo simulation of the electron motion in an Ar microhollow cathode disch arge

In this paper, the electron motion in a submillimeter level microhollow cathode discharge(MHCD) is investigated under high pressures by Monte Carlo simulation. Some swarm parameters have been obtained such as the electron density distribution in the field direction for a steady state, the energy and spatial distribution under different pressures.The result shows that MHCD under high pressures can reflect in more detail the essence of the 'oscillating' effect of the hollow cathode discharge.When electrons oscillate in MHC,most of them are scattered still forward.With increasing pressure,the effect of lateral scattering will exhibit gradually.