New silicon-based fibre assemblies for applications in integrated optics and optical MEMS |
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| Authors: | M. Hoffmann E. Voges |
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| Affiliation: | Universit?t Dortmund, Lehrstuhl für Hochfrequenztechnik, Otto-Hahn-Str. 6, 44221 Dortmund, Germany, DE
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| Abstract: | Nearly closed rhombus-shaped channels in micromachined silicon with very high accuracy for fibre array assemblies are presented. The fabrication and the assembly of fibres are described. The achieved accuracy is comparable with conventional V-groove assemblies. Additionally, rhombus-shaped channels allow new applications such as monitor pigtails with integrated photodiodes or buried fibre supplies in optical MEMS. Received: 22 May 2001 / Revised version: 7 September 2001 / Published online: 30 October 2001 |
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| Keywords: | PACS: 42.81 Qb 42.82 Fv |
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