Cr掺杂对GLC薄膜结构及其摩擦学性能的影响

采用磁控溅射方法制备类石墨碳膜(GLC)及掺杂金属Cr的类石墨碳膜(GLC-Cr),利用场发射扫描电子显微镜(SEM)、拉曼光谱仪(Raman)、X射线光电子能谱仪(XPS)、纳米压痕仪等测试技术对比分析两薄膜样品的结构及机械性能,利用UMT-3多功能摩擦磨损试验机考察其在大气、去离子水、发动机油3种环境下的摩擦学性能.结果表明:本实验参数下制备的类石墨碳膜中,Cr的掺杂促使了类石墨碳膜中sp2杂化键的形成,降低了GLC薄膜的硬度及弹性模量,但在3种不同环境下均使得类石墨碳膜的摩擦学性能得到明显改善.其中水介质的存在可明显降低类石墨碳膜的摩擦系数,而油润滑介质虽未使得其摩擦系数明显降低,但其摩擦曲线波动性及磨损率均最小.

Effect of Cr Doping on the Microstructure and Tribological Performances of Graphite-like Carbon Films

Graphite-like carbon ( GLC ) film and graphite-like carbon film doped with Cr ( GLC-Cr ) were fabricated successfully using magnetron sputtering technique. The structure and mechanical properties that GLC and GLC-Cr films were characterized by field emission scanning electron microscopy,Raman spectroscopy,X-ray photoelectron spectroscopy and nanoindentor. The tribological performance in different environments of films were investigated by UMT-3 multi-functional tribometer. Experimental results indicated that,compared with the pure GLC film,the content of sp² bonds in graphite-like carbon films were increased and the hardness was decreased. And the tribological properties of graphite-like carbon film was improved significantly in three different environments by using Cr as dopant. The friction coefficient of GLC and GLC-Cr films decreased in the presence of water. However,the volatility of friction curve and wear rate were all the lowest and exhibited more excellent self-adapted friction reducing and antiwear properties under the environment of oil.