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Multiaxis interferometric displacement measurement for local probe microscopy |
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| Authors: | Josef Lazar Jan Hrabina Mojmír ?ery Petr Klapetek Ond?ej ?íp |
| Affiliation: | (1) National Key Laboratory of Science and Technology on Tunable laser, Harbin Institute of Technology, Harbin, 150001, China;(2) Tianjin Key Laboratory of Optical Thin Films, Tianjin Jinhang Institute of Technical Physics, Tianjin, 300192, China |
| Abstract: | We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length. |
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