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Determination of Boron Diffusion Profiles by Statistical Autoradiography Spectrometry |
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| Authors: | V. D. Rusov T. N. Zelentsova V. I. Gretchan S. N. Kravtchenko Yu. F. Babikova |
| Abstract: | Profiles of boron in a planar thyristor structure have been measured by thermal neutron activation and solid state nuclear track detector were utilized for registration of the nuclear reaction products. The maximum sensitivity for boron in the studies case was 1015 atoms · cm?3. The developed method can be used for the nondestructive determination of dope profiles for ion-implanted structures. |
| Keywords: | autoradiography boron cellulose esters dielectric track detectors diffusion length doped materials nondestructive analysis thyristors |