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Structure of multicomponent amorphous semiconductor films
Authors:Min Szu-kwei
Affiliation:Shanghai Institute of Ceramics, Academia Sinica, Shanghai, China
Abstract:
Composition of multicomponent amorphous semiconductor films varies with the preparation technique and the chemical nature of component atoms. Inhomogeneous structures due to phase separation of compositional fluctuation have been observed in these films. It seems that there are some regularities governing the film growth and the structure of liquid phase condensation.
Keywords:
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