A comment on preparation of amorphous stage in vacuum-deposited film from study of its crystallization |
| |
Authors: | Kunisuke Maki |
| |
Institution: | Department of Physics, Yokohama City University, Seto, Yokohama, Kanagawa 236, Japan |
| |
Abstract: | This work gives a comment on density change in amorphous stage during growth of vacuum-deposited film, which is based on change in rate of increase in film thickness of crystallized stage with increasing vapour stream, and thickness-dependence of crystallization temperature. This may offer an idea for the formation of ideal amorphous stage with void-free. |
| |
Keywords: | |
本文献已被 ScienceDirect 等数据库收录! |
|