Abstract: | Basing on quantum chemical simulations (semi‐empirical methode PM3) and vibration spectroscopy (Infrared (IR) and inelastic neutron scattering (INS)) and using other experimental data, a model of the formation of fumed silica particles is proposed, leading from initial molecules, via protoparticles and primary particles up to aggregates and agglomerates. Also, defintions of products in the flame process steps are suggested, from a chemical point of view. This process may be described as a sequence of states: Molecules ? (molecular clusters = protoparticles) ? primary particles ? aggregates ? agglomerates |