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| 金刚石膜生长过程原位光发射谱研究 | |
| 引用本文： | 崔景彪,方容川. 金刚石膜生长过程原位光发射谱研究[J]. 物理化学学报, 1996, 12(2): 102-104. DOI: 10.3866/PKU.WHXB19960202 |
| 作者姓名： | 崔景彪 方容川 |
| 作者单位： | Department of Physics,Structure Research Laboratory,University of Science and Technology of China,Hefei 230026 |
| 基金项目： | 国家863高技术发展计划资助 |
| 摘 要： | 近年来由于化学气相沉积（CVD）金刚石膜具有优异的物理、化学性能及广阔的应用前景而引起人们的普遍关注．现在人们越来越多地把注意力移向金刚石膜生长过程的研究，即生长机理的实验和理论研究·这些研究致力于探讨反应过挥中存在的基团种类、作用及气相如何转变为固态的金刚 |
| 关 键 词： | 光发射谱 反应基团 电子增强热灯丝CVD |
| 收稿时间： | 1995-10-24 |
| 修稿时间： | 1995-11-23 |
Investigation of Diamond Growth Process by in situ Optical Emission |
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| Cui Jingbiao, Fang Rongchuan. Investigation of Diamond Growth Process by in situ Optical Emission[J]. Acta Physico-Chimica Sinica, 1996, 12(2): 102-104. DOI: 10.3866/PKU.WHXB19960202 | |
| Authors: | Cui Jingbiao Fang Rongchuan |
| Affiliation: | Department of Physics,Structure Research Laboratory,University of Science and Technology of China,Hefei 230026 |
| Abstract: | In situ opticaJ eAnssion spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 mm.The ethession lines from atoAnc hydrogen, molecular hydrogen, CH and CH radicals were observed in the visible region. Effects of the substrate bias on ethession spectra and diamond nucleation were also investigated. It is found that substratboan enhance the nucleation density, which may due to the changes of atoAnc hydrogen concentration and the increase of electron mean temperatuxe. |
| Keywords: | Optical emission spectrum Reaction species Electron assisted hot filament CVD |
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