电子回旋共振等离子体密度均匀性的数值研究

基于漂移扩散近似,在轴对称假设下,对电子回旋共振等离子体源腔室内的等离子体建立了二维流体模型.采用有限差分法对所建立的模型进行了自洽数值模拟,得到了等离子体密度均匀性随时间演化的数值结果.通过对数值结果的分析,研究了背景气体压强、微波功率和磁场线圈电流对等离子体密度均匀性的影响.研究表明,在电离初期,电子密度的均匀性好于离子密度的均匀性.在电离后期,离子密度的均匀性好于电子密度的均匀性.随着背景气体压强的增大,电子密度和离子密度的均匀性都在增加,且离子密度的均匀性增加的更快.随着微波功率的增大,电子密度和 关键词： 等离子体密度均匀性 背景气体压强 微波功率 磁场线圈电流

Numerical study on uniformity of electron cyclotron resonance plasma density

Based on drift-diffusion approximation and under axis-symmetric assumption, a two-dimensional(2D) fluid model is established for the plasma in the chamber of electron cyclotron resonance plasma source. A finite difference method is used for self-consistent numerically simulating the model. Numerical results of uniformity evolution of plasma density are obtained. From the analysis of the numerical results, the effects of background gas pressure, microwave power and current in magnetic field coil on uniformity of the plasma density are studied. The results shows that during the initial ionization, the uniformity of electron density is better than that of ion density. During the later ionization, the uniformity of ion density is better than that of electron density. As background gas pressure increases, the uniformities of both electron and ion densities increase, and the uniformity of ion density increases faster. As microwave power increases, the uniformities of both electron and ion densities increase with almost the same rates. As current in magnetic field coil increases, the uniformities of both electron and ion densities increase at almost the same rates. However, when the current in magnetic field coil becomes big enough, the uniformities of both electron and ion densities decrease at almost of same rates.