X-ray photoionization cross sections for quantitative analysis

The relative photoemission intensities from subshells of 51 elements and simple compounds have been measured using X-ray photoelectron spectroscopy. The chemical composition of each specimen surface was monitored by Auger electron spectroscopy and contamination was minimized by Ar⁺ ion bombardment. Experimental photoelectron cross sections derived for MgKα (1254 eV) radiation were compared with theoretical Hartree-Slater subshell photoionization cross sections calculated by Scofield. Good correlation (r = 0.96) between theory and experiment was observed over two orders of magnitude for most of the elements studied. Relative cross sections for subshells of a given element are also consistent with theoretical values, with several notable exceptions. The results indicate that quantitative analysis of ESCA spectra is possible using the Scofield cross sections.