1064nm激光诱导Ge（111）与Cl2反应动力学

采用超声分子束和时间分辨和质谱技术研究了１０６４ｎｍ脉冲激光辐照下Ｇｅ（１１１）与Ｃｌ２的反应动力学，实验结果表明，该反应的主要产物为ＧｅＣｌ，提高入射氯分子的平动能将增加反应速率，激光能量密度对ＧｅＣｌ２产率呈指数关系，而对ＧｅＣｌ２的平动温度影响不大。升高Ｇｅ（１１１）表面温度也能提高反应产率，同时还讨论了近红外激光诱导ＧｅＣｌ２反应的机理。

Kinetics of Laser-Induced Reaction of Ge(111)With Cl_2 Under Laser Irradiation at 1064 nm

Laser-induced gas-surface reaction of Ge(111)surface with chlorine is investigated by a CW supersonic molecular beam under a pulsed laser irradiation at 1064 nm.A major desorbed reaction product GeCl2 is determined at different surface temperatures by a timeresolved mass spectrometry.The reaction yield of GeCl2 increases obviously with increasing the translational energy of the incident chlorine molecules,laser fluence and surface temperature. But the translational temperature of GeCl2 measured by time-of-flight spectra are independent of incident Cl2 tanslational energy and laser fluence. A possible reaction mechanism for the laser-induced reaction of Ge(111)with Cl2 at 1064 nm mainly consists of the dissociative chemisorption of Cl2 on the surface,the reaction of absorbed Cl with Ge atoms and the laser-induced thermal desorption.