| 溅射原子角分布与靶点表面形貌的关联研究 |
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| 引用本文： | 王震遐,潘冀生,陶振兰,章骥平,张慧明,张伟坪,卢兆伦. 溅射原子角分布与靶点表面形貌的关联研究[J]. 物理学报, 1991, 40(2): 316-322 |
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| 作者姓名： | 王震遐 潘冀生 陶振兰 章骥平 张慧明 张伟坪 卢兆伦 |
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| 作者单位： | (1)杭州大学物理系,杭州,310028; (2)中国科学院上海原子核研究所,上海,201800 |
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| 摘 要： | 27keV的Ar+离子垂直轰击处于不同温度的Cd靶,用捕获膜技术和Rutherford背散射谱仪(RBS)测定溅射原子角分布,并对所有样品的靶点形貌进行扫描电子显微镜(SEM)观察。结果发现,所有的角分布都呈over-cosine形状,但是在极角为0°处实验值与cosine值的偏离△,是不同的,在靶温度为150℃时的偏离△T小于在室温时的偏离△R,亦即△T<△R,提出一个简单的模型对这种溅射角分布关键词：
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| 关 键 词： | 溅射原子 角分布 靶点 表面形貌 |
| 收稿时间： | 1990-04-24 |
A RESEARCH OF THE CORRELATION BETWEEN SURFACE TOPOGRAPHY AND ANGULAR DISTRIBUTION OF SPUTTERED ATOMS |
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| WANG ZHEN-XIA,PAN JI-SHENG,TAO ZHEN-LAN,ZHANG JI-PING,ZHANG HUI-MING,ZHANG WEI-PING and LU ZHAO-LUN. A RESEARCH OF THE CORRELATION BETWEEN SURFACE TOPOGRAPHY AND ANGULAR DISTRIBUTION OF SPUTTERED ATOMS[J]. Acta Physica Sinica, 1991, 40(2): 316-322 |
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| Authors: | WANG ZHEN-XIA PAN JI-SHENG TAO ZHEN-LAN ZHANG JI-PING ZHANG HUI-MING ZHANG WEI-PING LU ZHAO-LUN |
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| Abstract: | The angular distributions of sputtered atoms of cadmium have been measured with 27 keV Ar+ ion bombardment at normal incidence with different target temperature by using collector technique and RBS analysis. After the sputtering experiment the surface structures have been observed using scanning electron microscope. For all samples the angular distributions are over-cosine. However, the values of the deviation △ from the cosine distribution at the axis of polar angle of 0°is not all the same. The deviation △T at the target temperature of 150℃ △R is smaller than that at room teperature. ie. △T<△R. A simple model is proposed to explain the formation of pattern of angular distribution. |
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