| 衍射光强取样分析法测定划痕宽度：实验部分 |
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| 引用本文： | 戴名奎,徐德衍.衍射光强取样分析法测定划痕宽度：实验部分[J].光学学报,1998,18(1):0-94. |
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| 作者姓名： | 戴名奎 徐德衍 |
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| 作者单位： | 中国科学院上海光学精密机械研究所 |
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| 摘 要： | 根据衍射光强取样分析法理论部分的测量原理设计了一套实验方案，比较了该方法一义、显痛实际宽度的测试结果，给出了其对测量误差，并分析了误差的主要来泊，该方法速度快，精度高，有推广和应用的价值。
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| 关 键 词： | 衍射花样 划痕宽度测量 衍射光强 取样分析 |
| 收稿时间： | 1997/1/15 |
Measuring Scratch Width by Sampling Diffracted-Light Intensity: Experiment |
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| Abstract: | An experimental arrangement has been built for measuring scratch width by sampling diffracted-light intensity. Using this arrangement, several specimen are measured, and the scratches widths can be obtained efficiently and quickly. In general case, the measuring error is smaller than ±15%. |
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| Keywords: | diffraction pattern scratch width measurement |
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