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Multiple scattering analysis of reflection high-energy electron diffraction intensities from GaAs(110)
Affiliation:Department of Physics and Laboratory for Surface Studies, University of Wisconsin-Milwaukee, Milwaukee, WI 53201, USA;Department of Electrical Engineering, University of Minnesota, Minneapolis, MN 55455, USA
Abstract:An accurate and fast dynamical theory for calculating reflection high-energy electron diffraction (RHEED) rocking-curve intensities at 10–40 keV is presented. The application of RHEED to surface structural analysis is demonstrated for the first time on a reconstructed surface by comparing data to calculated spectra for GaAs(110). The technique is highly sensitive to structural changes along specific directions due to its forward-scattering geometry.
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