A critical review of the chemical kinetics of SF4, SF5, and S2F10 in the gas phase

The gas phase chemical kinetics of SF₄, SF₅, and S₂F₁₀ are reviewed with particular emphasis on relevance to the general problem of the dielectric breakdown of SF₆. Specific reaction systems treated are SF₄ + F₂, SF₅ + SF₅, and the pyrolysis of S₂F₁₀. Computer modeling calculations were carried out to arrive at the best estimates of rate parameters. Based on the results of these calculations, sets of recommended rate parameters are provided. The major discrepancies and problems in establishing the kinetic data base are described. Thermochemical consequences of different model calculations are given.