Analysis of nano channel formation in quartz cubes by laser-induced process |
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Authors: | Qin S J Li Wen J |
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Institution: | (1) Laboratory for Photoelectric Technology and Application, Guizhou University, 550025 Guiyang, China;(2) Center for Micro and Nano Systems, The Chinese University of Hong Kong, Hong Kong SAR, China;(3) LNM, Institute of Mechanics, Chinese Academy of Sciences, 100080 Beijing, China |
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Abstract: | A novel laser processing technique was developed for making channels in the nano regime in this paper. A Nd:YAG laser was
used to dry fabricate micro channels (25μm∼100 μm diameter) in a 1 cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on
a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are
smooth and with extremely high aspect ratio (∼104 depth to width ratio). A possible mechanism is proposed to explain the formation of the nano channels. This laser-based nano
channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis
driven nano-filtration.
The project supported by the National Natural Science Foundation of China (50375031) and the Hong Kong Research Grants Council
(CUHK 4416/99E) |
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Keywords: | laser micromachining nano channel laser-induced splitting fracture mechanics |
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