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Lateral growth rates in laser CVD of microstructures
Authors:F. Petzoldt  K. Piglmayer  W. Kräuter  D. Bäuerle
Affiliation:(1) Angewandte Physik, Johannes-Kepler-Universität Linz, A-4040 Linz, Austria;(2) Present address: Institut für Angewandte Materialforschung-IFAM, Lesumer Heerstrasse 36, D-2820 Bremen-Lesum, Fed. Rep. Germany;(3) Present address: Austria Mikro-Systeme Int.-AMI, A-8141 Unterpremstätten, Austria
Abstract:
Lateral growth rates of Ni spots deposited on absorbing substrates by decomposition of Ni(CO)4 with visible Kr+ laser light have been measured. The experimental data are consistent with the calculated temperature distributions. The mechanism of decomposition is thermal with an apparent chemical activation energy of 22±3 kcal/mole for the temperature range 350 KlETlE500 K.
Keywords:42.60–  v  81.15.Gh  61.55.Fe
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