用YAG激光制备类金刚石薄膜及其光学折射率研究

用高功率的Ｎｄ＾３＋：ＹＡＧ脉冲激光轰击真空室内的石墨靶，形成激光等离子体雾状物质，在硅衬底上沉积形成类金刚石薄膜，用椭圆偏振光谱法测量不同衬底温度下制备的系列样品的厚度和折射率，发现随着衬底温度的升高，薄膜的厚度减小而的折射率增大，这种可以控制折射率米化的薄膜，可能为光学增透增反膜的制备提供一种新方法。

A Study of Optical Refractivity in Diamond-Like CArbon Films Prepared by YAG Laser Technique

Using a high power pulse YAG laser to impinge on a graphite target in a high vacuum chamber, producing foggy-like matter of laser plasma in the space of the camber, diamond-like carbon thin films can be deposited on the Si substrate.The refractivity of the films prepared at different substrate temperature was measured by illipsometry. It was found that as the substrate temperature increased the thickness of the film decreased but the refractivity raised. This indicates a method to produce films with changeable refractivity to meet the requirement of optically enhanced transmission or reflection.