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Ultraviolet Phototransistors on AlGaN/GaN Heterostructures
作者姓名:陈辰  姜文海  任春江  李忠辉  焦刚  董逊  陈堂胜
作者单位:[1]Department of Physics, Nanjing University, Nanjing 210093 [2]National Key Laboratory of Monolithic Integrated Circuits and Modules, Nanjing Electronic Devices Institute, Nanjing 210016
基金项目:Supported by the National Basic Research Programme and the Advance Research Foundation of China under Grant Nos 513270403 and 51308040308.
摘    要:We report on the fabrication and characterization of phototransistors based on AIGaN/GaN heterostructure grown over 6H-SiC substrates. The device has two functions: as a high electron mobility transistor (HEMT) and an ultraviolet photodetector at the same time. As an HEMT, its maximum transconductance is 170mS/ram, while the minimum cutoff frequency fT and the maximum oscillation frequency fm are 19 and 35 GHz, respectively. As a photodetector, the device is visible blind, with an ultraviolet/green contrast of three orders of magnitude, and a responsivity as high as 1700 A/W at the wavelength of 362nm.

关 键 词:紫外线  光电晶体管  AlGaN  GaN  异质结构
收稿时间:2007-2-13
修稿时间:2007-02-13

Ultraviolet Phototransistors on AlGaN/GaN Heterostructures
CHEN Chen,JIANG Wen-Hai,REN Chun-Jiang,LI Zhong-Hui,JIAO Gang,DONG Xun,CHEN Tang-Sheng.Ultraviolet Phototransistors on AlGaN/GaN Heterostructures[J].Chinese Physics Letters,2007,24(9):2707-2709.
Authors:CHEN Chen  JIANG Wen-Hai  REN Chun-Jiang  LI Zhong-Hui  JIAO Gang  DONG Xun  CHEN Tang-Sheng
Institution:1 Department of Physics, Nanjing University, Nanjing 210093 ;2 National Key Laboratory of Monolithic Integrated Circuits and Modules, Nanjing Electronic Devices Institute, Nanjing 210016
Abstract:We report on the fabrication and characterization of phototransistors based on AlGaN/GaN heterostructure grown over 6H-SiC substrates. The device has two functions: as a high electron mobility transistor (HEMT) and an ultraviolet photodetector at the same time. As an HEMT, its maximum transconductance is 170mS/mm, while the minimum cutoff frequency fT and the maximum oscillation frequency fm are 19 and 35GHz, respectively. As a photodetector, the device is visible blind, with an ultraviolet/green contrast of three orders of magnitude, and a responsivity as high as 1700A/W at the wavelength of 362nm.
Keywords:85  60  Dw  73  61  Ey  78  66  Fd
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