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Pinhole-Free Ultrathin Silicon Oxide Layer by Ozone-Dissolved Deionized Water
Authors:Vibhor Kumar  Munan Gao  Ngwe Zin
Affiliation:1. School of Engineering, Rutgers, The State University of New Jersey, Piscataway, NJ, 08854 USA;2. School of Engineering, Rutgers, The State University of New Jersey, Piscataway, NJ, 08854 USA

Department of Electrical and Computer Engineering, Rutgers, The State University of New Jersey, Piscataway, NJ, 08854 USA

Abstract:
Keywords:ozone-dissolved deionized water  passivation  pinholes  silicon oxide  solar cells
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