Powder synthesis and electrical,dielectric spectroscopic characterization of rare earth disilicates (D-Er2Si2O7): Transistor scaling-22 nm or beyond

Rare earth disilicates are now a day's being analyzed as a dielectric layer for transistor scaling for the advanced 22 nm regime or beyond. So to explore these materials, the polymorphic powdered Er₂Si₂O₇ (D phase) is synthesized by solid state double sintering method to study its characteristics. Structural characterization has been performed by X-ray diffraction. SEM and EDX results shows the rods like morphology of particles and composition. The dc electrical properties are evaluated by two probe method as a function of temperature. The dielectric spectroscopic measurements of D-Er₂Si₂O₇ are performed in the temperature range 300–420 K and frequency range 1 kHz to 1 MHz. The dc electrical transport phenomenon is analyzed using Mott’s variable-range hopping approach. The ac conductivity σ_ac(ω) is obtained through the dielectric spectroscopic measurements.