Atomic and molecular emission spectroscopy on an expanding argon/methane plasma |
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| Authors: | J. J. Beulens C. Gastineau N. Guerrassimov J. Koulidiati D. C. Schram |
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| Affiliation: | (1) Einhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands;(2) Present address: ENSPS, 07 rue l'Université, 67000 Strasbourg, France;(3) Present address: Institute of Electronics, Bulgarian Academy of Sciences, Boul. Lenin 73, 1784 Sofia, Bulgaria;(4) Present address: Department of Physics, University d'Orleans, P.O. Box 6759, 45067 Orleans Cedex 2, France |
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| Abstract: | A supersonically expanding cascaded arc plasma in argon is analyzed axperimentally by emission spectroscopy. The thermal cascaded arc plasma is allowed to expand through a conically shaped nozzle in the arc anode into the vacuum vessel. In the nozzle monomers (CnHv) are injected. The monomers are dissociated and ionized by the argon carrier plasma, and transported toward a substrate by means of the expansion. Emission spectroscopy is used to obtain temperatures and particle densities. By varying external parameters (e.g., arc power, gas flow rates) plasma parameters can be linked with (e.g. parameters (e.g., refractive index). |
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| Keywords: | Expanding cascaded arc plasma a-C:H deposition atomic emission spectroscopy molecular emission spectroscopy |
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