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| 多电极静电拉伸薄膜反射镜的光学检测 | |
| 引用本文： | 钟兴,金光,张鹏,张元.多电极静电拉伸薄膜反射镜的光学检测[J].应用光学,2011,32(2):282-286. |
| 作者姓名： | 钟兴 金光 张鹏 张元 |
| 作者单位： | 1. 中国科学院长春光学精密机械与物理研究所, 吉林 长春 130033; 2. 中国科学院研究生院, 北京 100039 |
| 摘 要： | 利用研制的φ300 mm口径多电极薄膜反射镜原理样机,开展了光学检测实验工作.利用高斯光学原理对薄膜反射镜的基本光学参数进行了检测,获得了随电压变化的薄膜反射镜曲率丰径和最大变形值曲线,趋势与理论计算结果一致.对薄膜反射镜的面形特性和面形检测方法进行了分析,采用激光干涉仪测试了无电压时中心区域的平面面形,RMS值为1.... |
| 关 键 词： | 多电极 静电拉伸 薄膜反射镜 Hartmann光栏法 |
Optical testing of multi-electrode electrostatic membrane mirror |
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| ZHANG Xing,JIN Guang,ZHANG Peng,ZHANG Yuan.Optical testing of multi-electrode electrostatic membrane mirror[J].Journal of Applied Optics,2011,32(2):282-286. | |
| Authors: | ZHANG Xing JIN Guang ZHANG Peng ZHANG Yuan |
| Institution: | 1. Changchun Institute of Optics, Fine Mechanics and Physics, CAS, Changchun 130033, China; 2. Graduate School of CAS, Beijing 100039, China |
| Abstract: | A membrane mirror prototype of Φ300 mm diameter was developed and optically tested. Basic optical parameters of membrane mirror were tested by Gaussian optics. The results show that relations between basic parameters of membrane mirror and the applied voltages are consistent with shaping theory. The surface shape characteristics and optical testing methods of membrane mirror are discussed. Laser interferometer was used to test the plat surface when voltages were zero, and the RMS (root mean square) value of surface error was 1.03λ (λ=632.8 nm). Hartmann testing was used to test membrane mirror surface with radius, and the result shows that RMS value of surface error changes from 24.1 μm to 14.7 μm when different multi electrode voltages are used for optimization. This validates that multiple electrodes with different voltages optimize the surface accuracy of membrane mirror. |
| Keywords: | multi-electrode electrostatic stretch membrane mirror Hartmann testing |
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