Electro-optical modulator using SiO2 waveguides with thermal poling on a Si substrate

A novel optical modulator using SiO₂ waveguides on a silicon substrate is proposed. The modulator is analyzed and designed with the finite element method. The numerical results have shown that an optimally designed modulator can give a broad bandwidth, good impedance match, and low cost. The proposed modulator can be fabricated easily using Si-based very large-scale integrated technology, and it is very suitable for opto-electronic integrated circuits.