Capacitance humidity sensor with carbon nitride detecting element |
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| Authors: | L.M. Zambov C. Popov M.F. Plass A. Bock M. Jelinek J. Lancok K. Masseli W. Kulisch |
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| Affiliation: | (1) University of Kassel, Institute of Technical Physics, Heinrich-Plett-Strasse 40, 34109 Kassel, Germany (Fax: +49-561/804-4136, E-mail: popov@schottky.physik.uni-kassel.de), DE;(2) PhysTech GmbH, 85368 Moosburg, Germany, DE;(3) Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 182 21 Prague 8, Czech Republic, CZ |
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| Abstract: | The humidity sensitive properties of carbon nitride (CNx) films deposited by two methods, inductively coupled plasma chemical vapour deposition utilizing transport reactions and pulsed laser deposition combined with an rf discharge, have been investigated. For this purpose capacitance humidity sensors with a CNx detecting element have been fabricated and tested. Fast and significant responses toward moisture are registered by the changes of the electrical parameters. The CNx films sensing mechanism has been discussed. The results obtained show unambiguously that CNx films appear to be a promising candidate as a humidity sensitive element in up-to-date electronic noses. Received: 6 December 1999 / Accepted: 7 January 2000 / Published online: 24 March 2000 |
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| Keywords: | PACS: 77.55 07.07.D 92.60.J |
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