净室技术与软件能力成熟度模型的融合

对基于软件能力成熟度模型（ＣＭＭ）的传统软件开发方法与净室技术进行了比较,阐述了如何将净室技术引入到一个基于ＣＭＭ 的软件开发框架之中,介绍了从传统方法向净室技术转化的一些方法．     

Performance Assessment of Probes Dedicated to the Monitoring of Surface Particle Contamination

Surface probes, based on airflow particle detachment coupled with optical particle counter, are actually available to measure the particle cleanliness of surfaces in cleanroom. No reliable data exits dealing with the performance assessment of these probes in unstuck and counting particles deposited on surfaces. This work presents a method for determining the efficiency of instruments dedicated to particle surface cleanliness measurements. The method is based on the realisation of standard particle deposits by sedimentation and analysis of whole of the contaminated surface by microscopy combined with a micrometric displacement bench. The method is used to assess a trial surface probe with 30 μm and 80 μm glass beads deposited on transparent (glass) or opaque (aluminium) surfaces at concentrations ranging from 1 particle·cm^–2 to 50 particles·cm^–2. The results obtained show that the overall efficiency of the instrument tested is less than 5 %. The detailed analysis of results shows that this low value is mainly due to poor efficiency of sampling and detection of particles in the optical counter. When analysed in terms of particle detachment efficiency, the results agree qualitatively with a force balance analysis taking into account the friction by airflow and the distribution of adhesion forces of glass particles to glass substrates or rough aluminium substrates. Such result shows that airflow based surface probes for particle cleanliness measurements should be systematically qualified for representative conditions of operations whereas analytical microscopy measurements could be considered as reference.