Photoresists comparative analysis using soft X-ray synchrotron radiation and time-of-flight mass spectrometry

Positive photoresists are widely used in lithographic process for the fabrication of relief components. When exposed to UV radiation they suffer chemical reactions modifying their chemical and physical properties. Aiming to follow molecular modifications among two different photoresists unexposed and previously exposed to ultraviolet light we have employed spectroscopic techniques coupled with mass spectrometry in the study of the AZ-1518 and AZ-4620 photoresists. The photon stimulated ion desorption (PSID) technique following the S K-edge NEXAFS spectrum was employed at the brazilian synchrotron light source (LNLS), during single-bunch operation and using time-of-flight mass spectrometry (TOF-MS) for ion analysis. NEXAFS and PSID mass spectra on both AZ-1518 and AZ-4620 photoresists (unexposed and exposed) were obtained and relative desorption ion yield curves determined for the main fragments as a function of the photon energy. They present marked different PSID spectra. Fragments related to the photochemical decomposition of the AZ-1518 photoresist could be clearly identified differently from the AZ-4620. Studies on the hardness of both photoresists were performed using O₂ plasma reactive ion etching (RIE) technique, analyzed by scanning electron microscopy (SEM) and used to explain different desorption yields in the PSID spectra. These results show that the PSID technique is adequate to investigate structural changes in molecular level in different unexposed and exposed photoresists, which is crucial for improving our knowledge about the breakup process.     

Phase transitions in metals on metals

Phase transitions in two-dimensional metal layers on metal surfaces are discussed, with emphasis on systems with attractive lateral interactions on densely packed surfaces. The experimental tools which give information on these transitions are described briefly and the results obtained with them are illustrated by examples of various metals on W and Mo surfaces.     

Stability and fragmentation of organic silicon functionalizations studied by laser desorption mass spectrometry

A method is introduced to investigate organic functionalizations on silicon by laser-induced thermal desorption (LITD), where well-ordered Si(1 1 1)-(1 × 1):H(D) surfaces are used to determine the desorption temperature as a function of laser fluence. To demonstrate the potential of this technique silicon surfaces with ultrathin oxide layers were functionalized with organic end groups. The species desorbed with focused XeCl laser pulses were monitored at an oblique angle and their time-of-flight (TOF) distributions were measured with a quadrupole mass analyzer after electron impact ionization. By assuming a negligible contribution of the oxide and organic layers to the heating effect, the TOF temperatures measured for Si(1 1 1)-(1 × 1):H(D) could be used to determine the mass of the desorbed species. Detailed results are presented for dimethylsilyl (DMS), bromomethyldimethylsilyl (BMDMS), and chloromethyldimethylsilyl (CMDMS) terminated surfaces which were prepared by silanization with suitable chloro and disilazane compounds. While for the DMS termination dimethylsilanol (76 u) is desorbed as a single species, clearly identifying the terminating group, in the case of BMDMS and CMDMS further fragmentation of the end group occurs at the surface.     

Influence of the photoionization process on the fragmentation of laser desorbed polycyclic aromatic hydrocarbons

Characterization of polycyclic aromatic hydrocarbons (PAHs) samples has been performed by laser desorption combined with multi-photon ionization technique using two different geometries of the ionization laser beam. This comparative study evidences the strong influence of ionization laser fluence on PAH fragmentation. Through a ∼10³ enlargement of the ionization probe volume and 10⁴ reduction of laser fluence over previous studies, fragment free mass spectra are obtained with higher sensitivity and selectivity. The ability to measure fragment free PAH mass spectra is a very important step in the end goal of measuring complex unknown mixtures of PAH desorbed from solid surface such as soot samples.     

An RF quadrupole–time-of-flight system for isobar-separation and multiplexed low-energy Rare-Isotope Beam experiments

A novel system consisting of RF quadrupole and time-of-flight sections is proposed, in which ions can be cooled, bunched, mass separated with a resolution sufficient to differentiate between isobars, and guided to different experimental setups, e.g. for precision mass measurements or mass-resolved decay spectroscopy. It enables multiplexed operation of several connected experiments and interleaved measurements using different nuclides in one connected experiment. Such a system could be employed advantageously at in-flight facilities, at which experiments with stopped exotic nuclei are made possible using gas-filled stopping cells, such as SHIPTRAP at GSI, or potentially at ISOL facilities. First results for individual stages of the system are presented.     

Correlated electron current and temperature dependence of the conductance of a quantum point contact

We investigate finite temperature corrections to the Landauer formula due to electron–electron interaction within the quantum point contact. When the Fermi level is close to the barrier height, the conducting wavefunctions become peaked on the barrier, enhancing the electron–electron interaction. At the same time, away from the contact the interaction is strongly suppressed by screening. To describe electron transport we formulate and solve a kinetic equation for the density matrix of electrons. The correction to the conductance G is negative and strongly enhanced in the region 0.5 × 2e²/h ≤ G ≤ 1.0 × 2e²/h. Our results for conductance agree with the so-called “0.7 structure” observed in experiments.     

Complex turing patterns in non-linearly coupled systems

Recently pattern formation in layered structures, showing complicated superimposed patterns, has been modeled by coupling two Turing systems linearly, i.e., passively, such that the characteristic length scales of the independent systems are well separated. Here we propose a model of two non-linearly coupled Turing systems to study pattern formation in layered membrane-like structures, where the coupling plays an active role and changes the kinetics of the uncoupled systems. Extensive numerical simulations show that non-linear coupling generates a number of new regular patterns different from the ones observed earlier with linearly coupled systems. Some of them turn out to be superimposed patterns with different length scales, but many are not. Also, contrary to the linear coupling case, the strength of the non-linear coupling is found to play an important role in the formation and selection of patterns.     

An Explicit Fractal Interpolation Algorithm for Reconstruction of Seismic Data

Based on our previous investigation and the pioneering work of other researchers, a novel explicit fractal interpolation method based on affine transform is proposed, in which we approximate the vertical scaling factors by the locally explicit expression. Numerical experiments indicate that the explicit fractal interpolation method shows great accuracy of reconstruction of the seismic profile and yields significant improvement over wave-equation based trace interpolation methods （unified approach）.     

First-principles electronic transport properties study of small carbon clusters: Cyclic C6

The transport properties of the six-atom carbon ring cluster C₆ sandwiched between Al(100) electrodes have been investigated by first-principles nonequilibrium Green's function technique. Our results demonstrate that the transport properties of monocyclic C₆ with D3h symmetry, with alternating bond angles, the most stable C₆ isomer, show metallic conductance. The charge transfer between the central molecule and the electrodes is very important for its transport properties. We also compare the equilibrium transmission spectra for C₆ in different isomers.     

Numerical Simulations of Calcium Ions Spiral Wave in Single Cardiac Myocyte

The calcium ions （Ca^2＋） spark is an elementary Ca^2＋ release event in cardiac myocytes. It is believed to buildup cell-wide Ca^2＋ signals, such as Ca^2＋ transient and Ca^2＋ wave, through a Ca^2＋-induced Ca^2＋ release （CICR） mechanism. Here the excitability of the Ca^2＋ wave in a single cardiac myoeyte is simulated by employing the fire-diffuse-fire model. By modulating the dynamic parameters of Ca^2＋ release and re-uptake channels, we find three Ca^2＋ signaling states in a single cardiac myoeyte： no wave, plane wave, and spiral wave. The period of a spiral wave is variable in the different regimes. This study indicates that the spiral wave or the excitability of the system can be controlled through micro-modulation in a living excitable medium.