A surface adsorption model for electroless cobalt alloy thin films

Thin cobalt alloy films have been obtained using electroless deposition solution with two reducing agents: dimethylamine borane (DMAB) and sodium hypophosphite. This system allows spontaneous and self-activated deposition of barrier layers on Cu lines and via contacts for ultra large scale integration (ULSI) interconnects applications. This work presents a study of the solution composition effects on the material properties and composition of the films. First, we present the deposition rates, the electrical resistance, the various element profiles in the thin film, and the thin film roughness. Next, we discuss the film’s composition and its dependence on the ratio between the reducing agents composition in the solution. The experimental results suggest that the film phosphorous and boron composition is determined by the surface adsorption rates of the reducing agents. Therefore, a surface co-adsorption model of the two reducing agents is proposed, formulated, analyzed, and compared to the experimental results. Finally, we discuss the model and its significance to the formation of high-quality ultra-thin barrier layers. Dedicated to Professor Dr. Algirdas Vaskelis on the occasion of his 70th birthday.     

镁及镁合金中微量磷的测定方法研究

磷与钼酸铵形成磷钼杂多酸络幌物,用乙酸丁酯萃取分离,用SnCl2还原反萃取后借磷钼蓝光度法测定镁及镁合金中微量磷。在波长700 nm处工作曲线线性范围0~1.5μg/mL,相关系数为0.9995,络合物表观摩尔吸光系数ε=1.45×104L.mol-1.cm-1,相对标准偏差在1.40%~3.10%之间,加标回收率在99.3%~101.0%之间,本法与ICP法相对照结果比较满意。     

Synthesis, crystal structures and ionic conductivities of Bi14P4O31 and Bi50V4O85. Two members of the series Bi18−4mM4mO27+4m (M=P, V) related to the fluorite-type structure

The two hitherto unknown compounds Bi₁₄P₄O₃₁ and Bi₅₀V₄O₈₅ were prepared by the direct solid-state reaction of Bi₂O₃ and (NH₄)H₂PO₄ or V₂O₅, respectively. Bi₁₄P₄O₃₁ crystallizes in a C-centred monoclinic symmetry (C2/c space group) with the unit-cell parameters: , , and β=93.63(1)° (Z=16). The symmetry of Bi₅₀V₄O₈₅ is also monoclinic (I2/m space group) with lattice parameters of , , and β=90.14(1)° (Z=2). Both structures correspond to a fluorite-type superstructure where the Bi and P or V atoms are ordered in the framework. An idealized structural model is proposed where the structures result of the stacking of mixed atomic layers of composition [Bi₁₄M₄O₃₁] and [Bi₁₈O₂₇] respectively. This new family can be formulated Bi_18−4mM_4mO_27+4m with M=P, V and where the parameter m (0?m?1) represents the ratio of the number of [Bi₁₄M₄O₃₁] layers to the total number of layers in the sequence. Bi₁₄P₄O₃₁ corresponds to m=1 when Bi₅₀V₈O₈₅ corresponds to m=1/3. In this last case, the structural sequence is simply one [Bi₁₄V₄O₃₁] layer to two [Bi₁₈O₂₇] layers. As predicted by the proposed structural building principle, Bi₁₄P₄O₃₁ is not a good ionic conductor. The conductivity at 650 °C is 4 orders of magnitude lower from those found in Bi₄₆M₈O₈₉ (M=P, V) (m=2/3) and Bi₅₀V₄O₈₅ (m=1/3).     

Epitaxial growth of uniform NiSi2 layers with atomically flat silicide/Si interface by solid-phase reaction in Ni-P/Si(1 0 0) systems

As metal-oxide-semiconductor field-effect transistor (MOSFET) devices are shrunk to the nanometer scale, flat shallow metal/Si electrical contacts must be formed in the source/drain region. This work demonstrates a method for the formation of epitaxial NiSi₂ layers by a solid-phase reaction in Ni-P(8 nm)/Si(1 0 0) samples. The results show that the sheet resistance remained low when the samples were annealed at temperatures from 400 to 700 °C. P atoms can be regarded as diffusion barriers against the supply of Ni to the Si substrate, which caused the formation of Si-rich silicide (NiSi₂) at low temperature. Furthermore, elemental P formed a stable capping layer with O, Ni and Si during the annealing process. A uniform NiSi₂ layer with an atomically flat interface was formed by annealing at 700 °C because of the formation of a Si-Ni-P-O capping layer and a reduction in the total interface area.     

A scanning tunneling microscopy study of PH3 adsorption on Si(1 1 1)-7 × 7 surfaces, P-segregation and thermal desorption

PH₃ adsorption on Si(1 1 1)-7 × 7 was studied after various exposures between 0.3 and 60 L at room temperature by means of scanning tunneling microscopy (STM). PH₃-, PH₂-, H-reacted, and unreacted adatoms can be identified by analyzing empty-state STM images at different sample biases. PH_x-reacted rest-atoms can be observed in empty-state STM images if neighboring adatoms are hydrogen terminated. Most of the PH₃ adsorbs dissociatively on the surface, generating H- and PH₂-adsorbed rest-atom and adatom sites. Dangling-bonds at rest-atom sites are more reactive than adatom sites and the faulted half of the 7 × 7 unit cell is more reactive than the unfaulted half. Center adatoms are overwhelmingly preferred over corner adatoms for PH₂ adsorption. The saturation P coverage is ∼0.18 ML. Annealing of PH₃-reacted 7 × 7 surfaces at 900 K generates disordered, partially P-covered surfaces, but dosing PH₃ at 900 K forms P/Si(1 1 1)- surfaces. Si deposition at 510 K leaves disordered clusters on the surface, which cannot be reordered by annealing up to 800 K. However, annealing above 900 K recreates P/Si(1 1 1)- surfaces. Surface morphologies formed by sequential rapid thermal annealing are also presented.     

Bio-energetic impairment in human calf muscle in thyroid disorders: a P MRS study

Mitochondrial metabolism particularly oxidative phosphorylation is greatly influenced by thyroid hormones. Earlier studies have described neuromuscular symptoms as well as impaired muscle metabolism in hypothyroid and hyperthyroid patients. In this study, we intend to look in to the muscle bioenergetics including phosphocreatine recovery kinetics based oxidative metabolism in thyroid dysfunction using in vivo ³¹P nuclear magnetic resonance spectroscopy (MRS). ³¹P MRS was carried out at resting state on 32 hypothyroid, 10 hyperthyroid patients and 25 control subjects. Nine out of 32 hypothyroid patients and 17 out of 25 control subjects under went exercise protocol for oxidative metabolism study and performed plantar flexion exercise while lying supine in 1.5 T magnetic resonance scanner using custom built exercise device. MRS measurements of inorganic phosphate (Pi), phosphocreatine (PCr), phosphodiesters (PDE) and adenosine triphosphate (ATP) of the calf muscle were acquired during rest, exercise and recovery phase. PCr recovery rate constant (k_PCr) and oxidative capacity were calculated by monoexponential fit of PCr versus time (t) at the beginning of recovery. During resting condition in hypothyroid patients, PCr/Pi ratio was reduced whereas PDE/ATP and Pi/ATP were increased. However, in case of hyperthyroidism, an increased PCr/Pi ratio and reduced PDE/ATP and Pi/ATP were observed. The results confirmed differential energy status of the muscle due to increased or decreased levels of thyroid hormone. Our results also demonstrate reduced oxidative metabolism in hypothyroid patients based on PCr recovery kinetics. PCr recovery kinetics study after exercise revealed decreased PCr recovery rate constant (k_PCr) in hypothyroid patients compared to controls that resulted in decrease in oxidative capacity of muscle by 50% in hypothyroids. These findings are consistent with a defect of high energy phosphate mitochondrial metabolism in thyroid dysfunction.     

AO-resistant properties of polyimide fibers containing phosphorous groups in main chains

A series of polyimide fibers containing phosphorus element derived from (3-aminophenyl) methyl phosphine oxide (DAMPO) diamine was exposed to an artificial atomic oxygen environment which simulated the space environment in low earth orbit (LEO). The mass loss, surface morphology, chemical composition, and mechanical properties of the fibers before and after atomic oxygen (AO) exposure were compared in detail with a blank sample. Results showed that the phosphor-containing fibers demonstrated lower mass change and less tensile strength reduction. SEM results showed that the fibers with phosphorous element had relatively dense surface after AO exposure. Meanwhile, XPS results indicated that a passivated phosphate layer, which could protect the following under-layer from attacking by AO, was formed on the surface of the fibers. These results indicated that the incorporation of diamine (DAMPO) into the main chains could protect the fibers for avoiding further erosion from AO exposure. Hence, the phosphor-containing PI fibers exhibits potential application in space fields.     

含磷有机硅杂化环氧树脂固化体系性能研究

通过磷酸与γ-环氧丙氧基三甲氧基硅烷反应得到含磷有机硅氧烷,并加入到环氧树脂/4,4'-二氨基二苯基甲烷体系中混合,通过溶胶-凝胶的方法制备了含磷有机硅杂化环氧树脂固化物.对固化体系进行了玻璃化转变温度、热失重、阻燃、拉伸强度、冲击强度测试分析.结果表明,该固化体系的阻燃性得到提高,极限氧指数在25.8～29.3,玻璃化转变温度得到提高,在161～179℃;虽然初始分解温度比纯环氧树脂固化物低,但800℃残炭率可以达到26.5%,提高了36%;拉伸强度得到提高,在71～94 MPa,冲击强度可以达到14.36 kJ/m2,提高了14%.该固化体系具有较好的阻燃性能和热性能,同时具有较好的力学性能.     

Synthesis of SAPO-41 from a new reproducible route using H3PO3 as the phosphorus source and its application in hydroisomerization of n-decane

In the new reproducible route, phosphorous acid (H₃PO₃) or the mixture of H₃PO₃ and phosphoric acid (H₃PO₄) are used as the phosphorus source to synthesize microporous silicoaluminophosohates. It is found that gels containing H₃PO₃ favor the formation of SAPO-41 materials. With only H₃PO₃ as the phosphorus source, pure SAPO-41 phase can be prepared with high crystallinity. When the mixture of H₃PO₃ and H₃PO₄ is used as the phosphorus source, the crystallization of SAPO-41 can be accelerated. Raman and XRD results show that SAPO-41 can be formed after crystallizing for 12 h. The dosage of the template di-n-propylamine (DPA) can be reduced in the mixed phosphorus source system. The SAPO-41 has been used to prepare catalysts for the hydroisomerization of n-decane. High selectivity of isomerization (89.5%) has been observed even at high conversion (88%) over the Pt/SAPO-41.