双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

PSO-LSSVM对LIBS定量分析精度的提高

针对土壤定量分析受基体效应影响大，LIBS定量分析精度不佳等问题，采用粒子群算法对LSSVM进行优化，提高模型的精确度。选取Pb Ⅰ 405.78 nm和Cr Ⅰ 425.44 nm作为分析谱线进行分析。采集十二个不同浓度样品的特征光谱，每个浓度样品在不同点采集20组数据，将其中17组数据设为训练集，3组数据设为预测集，用LSSVM和PSO-LSSVM两种方法建立定标模型。对比两种模型的拟合相关系数（R2）、训练集均方根误差（RMSEC）和预测集均方根误差(RMSEP)。由于自吸收效应的影响，随着浓度的增加，预测值逐渐低于实际值，LSSVM定标模型的拟合程度较低，无法达到实验要求，模型性能有待提高。利用粒子群算法对LSSVM的模型参数惩罚系数和核函数参数进行优化，得到最佳的参数组合，Pb元素为(8 096.8, 138.865 7)，Cr元素为(4 908.6, 393.563 5)，用最佳的参数组合构建LSSVM的定标模型。相比于LSSVM，PSO-LSSVM定标模型的精确度更高，Pb和Cr元素的R2提高到了0.982 8和0.985 0，拟合效果明显提升。Pb和Cr元素的训练集均方根误差由0.026 0 Wt%和0.027 2 Wt%下降到0.022 4 Wt%和0.019 1 Wt%，预测集均方根误差由0.101 8 Wt%和0.078 8 Wt% 下降到0.045 8 Wt%和0.042 0 Wt%，模型的稳定性进一步提高。说明PSO-LSSVM算法能够更好地降低土壤基体效应和自吸收效应带来的影响，提高分析结果的精确度与稳定性。     

不同退火条件对PEALD制备的Ga2O3薄膜特性的影响

利用等离子增强原子层沉积技术(PEALD)在c面蓝宝石衬底上制备了氧化镓(Ga₂O₃)薄膜,研究了退火气氛(v(N₂)∶v(O₂)=1∶1(体积比)、空气和N₂)及退火时间对Ga₂O₃薄膜晶体结构、表面形貌和光学性质的影响。研究结果表明,退火前的氧化镓处于亚稳态,不同退火气氛下退火后晶体结构发生明显改变,而且退火气氛中N₂比例增加有利于Ga₂O₃重结晶。在N₂气氛下退火达到30 min,薄膜结构已由亚稳态转变成择优取向的β-Ga₂O₃。而且表面形貌分析表明,退火30 min后表面形貌开始趋于稳定,表面晶粒密度不再增加。另外实验样品在 400~800 nm的平均透射率几乎是100%,且光吸收边陡峭。采用N₂气氛退火,对于富氧环境下沉积的Ga₂O₃更利于薄膜表面原子迁移,以及择优取向Ga₂O₃重结晶。     

射频等离子制备石墨烯负载Co3O4催化剂及其析氧性能研究

氢能的引入能有效提升配电网的供电可靠性,而电解水制氢是实现低碳转型的关键技术,开发高效的电解水催化剂势在必行。过渡金属氧化物储量大、催化活性高,是具有广阔应用前景的析氧反应催化剂。本文通过射频等离子体处理制备石墨烯上负载Co₃O₄析氧催化剂,XRD、Raman和XPS测试结果显示,二维结构石墨烯的引入加速表面电子迁移,增大了反应面积。等离子体处理促进了纳米粒子在石墨烯上的负载,利用等离子体刻蚀作用在催化剂表面制造出大量碳结构缺陷和氧空位结构,改善了活性位点分布,有效调控Co₃O₄电子结构,提高析氧催化活性。电化学测试表明,本文中合成的Co₃O₄@rGO在电流密度为50 mA·cm^-2时的过电位为410 mV,动力学反应速率较快,表现出优于商业IrO₂的析氧催化活性。     

层间单向耦合星形圆环状网络的同步能力

多层复杂网络同步是网络科学研究的一个前沿方向,目前对多层复杂网络同步性的研究大多集中在无向多层复杂网络上,而更加贴近于实际的多层有向网络研究很少.首先根据主稳定方程(MSF)严格计算出M层层间单向耦合星形圆环状网络的超拉普拉斯矩阵的特征值谱,并得到反映M层层间单向耦合星形圆环状网络同步能力的重要指标,其次讨论了M层层间单向耦合星形圆环状网络在同步域为有界和无界的两种情况下同步能力与层数、节点数、层间耦合强度和层内耦合强度及中心节点耦合强度之间的关系.最后通过数值模拟给出了层间单向耦合星形圆环状网络同步能力的仿真图像,验证了理论结果的有效性.     

石墨烯负载的氧配位钴单原子稳定金属锂负极

Lithium (Li)-based batteries are the dominant energy source for consumer electronics, grid storage, and electrified transportation. However, the development of batteries based on graphite anodes is hindered by their limited energy density. With its ultrahigh theoretical capacity (3860 mAh∙g⁻¹), low redox potential (−3.04 V), and satisfactorily low density (0.54 g∙cm⁻³), Li metal is the most promising anode for next-generation high-energy-density batteries. Unfortunately, the limited cycling life and safety issues raised by dendrite growth, unstable solid electrolyte interphase, and "dead Li" have inhibited their practical use. An effective strategy is to develop a suitable lithiophilic matrix for regulating initial Li nucleation behavior and controlling subsequent Li growth. Herein, single-atom cobalt coordinated to oxygen sites on graphene (Co-O-G SA) is demonstrated as a Li plating substrate to efficiently regulate Li metal nucleation and growth. Owing to its dense and more uniform lithiophilic sites than single-atom cobalt coordinated to nitrogen sites on graphene (Co-N-G SA), high electronic conductivity, and high specific surface area (519 m²∙g⁻¹), Co-O-G SA could significantly reduce the local current density and promote the reversibility of Li plating and stripping. As a result, the Co-O-G SA based Li anodes exhibited a high Coulombic efficiency of 99.9% at a current density of 1 mA∙cm⁻² with a capacity of 1 mAh∙cm⁻², and excellent rate capability (high current density of 8 mA∙cm⁻²). Even at a high plating capacity of 6 mAh∙cm⁻², the Co-O-G SA electrode could stably cycle for an ultralong lifespan of 1300 h. In the symmetric battery, the Co-O-G SA based Li anode (Co-O-G SA/Li) possessed a stable voltage profile of 18 mV for 780 h at 1 mA∙cm⁻², and even at a high current density of 3 mA∙cm⁻², its overpotential maintained a small hysteresis of approximately 24 mV for > 550 h. Density functional theory calculations showed that the surface of Co-O-G SA had a stronger interaction with Li atoms with a larger binding energy, −3.1 eV, than that of Co-N-G SA (−2.5 eV), leading to a uniform distribution of metallic Li on the Co-O-G SA surface. More importantly, when matched with a sulfur cathode, the resulting Co-O-G SA/lithium sulfur full batteries exhibited a high capacity of 1002 mAh∙g⁻¹, improved kinetics with a small polarization of 191 mV, and an ultralow capacity decay rate of 0.036% per cycle for 1000 cycles at 0.5C (1C = 1675 mA∙g⁻¹) with a steady Coulombic efficiency of nearly 100%. Therefore, this work provides novel insights into the coordination environment of single atoms for the chemistry of Li metal anodes for high-energy-density batteries.     

基于Parity-Time对称结构极点效应构建光学三极管模型

为了构建光学三极管模型,设计了一个基于半导体磁性材料InSb的PT(parity-time)对称耦合微腔的结构模型。通过结构参数优化,产生了PT对称结构磁场强耦合的极点效应。在极点频率附近,通过改变输入电流信号改变施加在磁性材料上的磁感应强度,实现极点状态下信号的放大输出。这种放大可以是同相,也可以是反相,该设计实现了特殊光学三极管模型。     

菱形颗粒冲蚀磨损特性试验及仿真研究

本文中针对单个硬质角形颗粒冲击金属材料表面的过程,设计了弹射试验装置,研究菱形颗粒冲击行为及冲蚀机理.采用高速摄像机,捕捉不同冲击速度v_i、冲击角度α_i和方位角度θ_i下颗粒的运动轨迹.建立了基于拉格朗日法的FEM-SPH耦合数值计算模型,借助于模型进一步分析了角形颗粒的运动学行为和变形凹坑形态.结果表明:冲击角α和方位角θ是决定颗粒旋转的关键因素,在某一固定冲击角αi下存在一个临界方位角θcr_i,当θiθ_(cri)时颗粒冲击后发生前旋旋转,当θ_iθ_(cri)时颗粒冲击后发生后旋旋转;冲击诱导的颗粒旋转对冲蚀机理的影响较大,颗粒前旋旋转对金属材料产生"耕犁"作用,后旋旋转对金属材料产生"撬起剔除"作用.颗粒的动能损失受到冲击角α_i和方位角θ_i的影响较大,临界方位角θ_(cri)下颗粒的动能损失最大,凹坑变形最严重.