Microelectromagnet for magnetic manipulation in lab-on-a-chip systems

We demonstrate a simple scheme for fabrication of microelectromagnets consisting of planar spiral coils semi-encapsulated in soft magnetic yokes using conventional microfabrication techniques. The microelectromagnets are suitable for applications operating at frequencies below 250 kHz. Conventional fabrication schemes for planar microelectromagnets typically rely on five mask steps. We allow the current to flow in the soft magnetic yoke and thereby two mask steps are eliminated. We have characterized the electromagnets electrically, the results agree well with theory, and the implications arising from current flowing in the magnetic yoke are discussed. We have integrated the microelectromagnets with microfluidic channels, and demonstrated separation of commercially available magnetic beads from a fluid in a microfluidic system, i.e. a lab-on-a-chip system.     

Towards a programmable magnetic bead microarray in a microfluidic channel

A new hybrid magnetic bead separator that combines an external magnetic field with 175 μm thick current lines buried in the back side of a silicon wafer is presented. A microfluidic channel was etched into the front side of the wafer. The large cross-section of the current lines makes it possible to use larger currents and obtain forces of longer range than from thin current lines at a given power limit. Guiding of magnetic beads in the hybrid magnetic separator and the construction of a programmable microarray of magnetic beads in the microfluidic channel by hydrodynamic focusing is presented.     

微系统动力学中的若干非线性问题

微系统是近十多年迅速发展的新兴交叉学科领域.微系统动力学是微系统科学中的重要组成部分.微系统一般具有固有的非线性.本文从建模、分析、设计、控制、实验、测试、材料及制造等几方面归纳了微系统动力学中的若干非线性问题,并对今后的研究方向进行了展望.      

Experimental modal analysis for microelectromechanical systems

The structural dynamics behavior of microelectromechanical systems (MEMS), which include moving, overhung, and compliant subcomponents, plays a pivotal role in determining their performance and reliability. Traditionally, experimental modal analysis is used to characterize the dynamic behavior of structures, as well as to derive, validate, update, and correct analytical and numerical models. Due to their small size, however, conventional modal testing methods cannot be directly applied to microstructures. In this paper we provide an overview of modal testing techniques for microsystems. A particular experimental modal analysis methodology that includes base excitation via a piezoelectric shaker and measurement through a laser interferometer is then described and evaluated. A distinguishing characteristic of the methodology is its simplicity, including its simple setup and off-the-shelf components. The modal model is derived for the base excitation of microcantilever beams. The effectiveness of the methodology is illustrated through various experiments on polysilicon microcantilevers for different geometries and ambient pressures. Analysis of the damping data for different pressures has confirmed the well-documented fact that the structural damping in microsystems can be considerably less than damping arising from interaction with the ambient gases.     

Nonlocal interactions: a jammerian analysis

It is general practice to describe a microsystem by means of a model characterized by probability amplitudes possessed at each spacetime point between preparation and measurement events. Recent developments initiated by Bell's theorem indicate that any such model must in some cases be considered as participating in nonlocal interactions. Adapting ideas originated by Jammer, this paper asserts that that conclusion may be indicative only of limitations in the applicability of physical properties in the modelling of microsystems and thus might not lead to inferences about the microsystems in themselves. Recent discussions of the Aharanov-Bohm effect further exemplify the difference in these alternative interpretations of nonlocality.     

Oscillatory flow in microchannels

Commonly used, lumped-parameter expressions for the impedance of an incompressible viscous fluid subjected to harmonic oscillations in a channel were compared with exact expressions, based on solutions of the Navier-Stokes equations for slots and channels of circular and rectangular cross-section, and were found to differ by as much as 30% in amplitude. These differences resulted in predicted discrepancies by as much as 400% in frequency response amplitude for simple second-order systems based on size scales and frequencies encountered in microfluidic devices. These predictions were verified experimentally for rectangular microchannels and indicate that underdamped fluidic systems operating near the corner frequency of any included flow channel should be modeled with exact expressions for impedance to avoid potentially large errors in predicted behavior.List of symbols A Channel cross-sectional area (m²) - A_c Membrane area (m²) - a Rectangular duct and slot half-width or radius (m) - b Rectangular duct half-depth and slot depth (m) - C Capacitance (m³/Pa) - C - D_h Channel hydraulic diameter (m) - E Voltage (V) - f Darcy friction factor - F Force (N) - I Channel inertance (Pa s²/m³) - i - Imaginary part of a complex number - J_k Bessel function of the first kind of order k - System transfer function - K Sum of minor loss factors - k Membrane stiffness (N/m) - L Channel length (m) - n Outward unit normal vector - P Fluid pressure (Pa) - p_n - Q Volumetric flow rate (m³/s) - R Channel resistance (Pa s/m³) - Real part of a complex number - Re Reynolds number, - V Velocity (m/s) - _V Volume (m³) - w Axial component of velocity (m/s) - Harmonic amplitude of membrane centerline displacement - Fluid impedance (kg/m⁴ s) - Duct aspect ratio, b/a - ² Nondimensional frequency parameter, - Nondimensional corner frequency, - Membrane shape factor - C/C - µ Fluid dynamic viscosity (Pa s) - Fluid kinematic viscosity (m²/s) - Mass density (kg/m³) - Radian frequency - _c R_s/I_s cutoff or corner frequency - _n Undamped natural frequency - Channel shape parameter in Eqs. 29 and 30 - Damping ratio - ( )_e Exact property - ( )_s Simplified property - (^–) Spatial average - Complex quantity     

Replication technology for optical microsystems

Replication technology is playing an increasingly important role in the production of optical microsystems and micro-optical elements. Hot embossing, injection moulding and UV-embossing all can produce high-quality optical elements in very cost-effective processes. New sol–gel materials allow the combination of replication with lithography to leave selected areas material-free for sawing and bonding. The development of wafer-scale replication technology using UV-curable sol–gel and polymer materials enables refractive and diffractive micro-optical elements as well as micro-mechanical alignment features to be replicated directly onto glass substrates or onto semiconductor device wafers. Grating nanostructures with linewidths less than 100 nm have been replicated into polymer and sol–gel materials for the cost-effective fabrication of large area subwavelength structures for applications such as polarisers and buried grating security features.