微焊点电致损伤与断裂的实验及数值研究

本文制作了微焊点试件,并通过施加较大的电载荷使其发生了电迁移。对微焊点在电迁移过程中的微观组织形貌及其演化进行了观察。结果发现,高温和常温条件下的电致失效模式都是阴极处的界面断裂,但是低温条件下的迁移试件会在阳极处形成凸丘,而高温下则没有。此外,本文还测试了微焊点在电迁移过程中的电阻、温度场以及塑性变形,以期找到微焊点电致损伤的表征方法。实验表明,红外方法可以快速准确地发现焊点表面和内部的缺陷,而电阻值对微焊点的电致损伤并不敏感。最后本文采用有限元方法分析了微焊点的电致应力及空位浓度,较好地解释了微焊点电致失效的机制。     

超大规模集成电路互连电迁移自由体积电阻模型

将晶核析出的Avrami 方程应用于描述超大规模集成电路中金属Al薄膜互连电迁移过程中电阻的演变. 根据电子散射理论，晶界电阻主要起源于晶界处空位或者空洞对电子的散射. 为了描述这些离子的特征，引入了自由体积的概念，将晶界处电子散射这个复杂的过程简化用自由体积的有效散射截面来描述，从而建立了自由体积与电阻变化的定量关系，统一描述了电迁移过程中不同阶段的电阻变化. 数值模拟结果表明，在第一个空洞成核时刻电阻会发生急剧变化，这一结果已被实验所证实. 关键词： 电迁移 Al互连 电阻变化     

Chiral separations by capillary electromigration techniques in nonaqueous media. II. Enantioselective nonaqueous capillary electrochromatography

A review on the advantages, peculiarities, and the potential of enantioselective capillary electrochromatography (CEC) in nonaqueous media is presented. Some fundamentals on CEC with particular focus on enantioselective CEC are discussed. The strategies, concepts, preferentially utilized chiral selectors and column technologies that have been utilized to succeed in highly efficient enantiomer separations by nonaqueous CEC are described thoroughly.     

铝互连线的电迁移问题及超深亚微米技术下的挑战

铝互连线的电迁移问题历来是微电子产业的研究热点，其面临的电迁移可靠性挑战也是芯片制造业最持久和最重要的挑战之一.从20世纪90年代开始，超深亚微米(特征尺寸≤0.18 μm)铝互连技术面临了更加复杂的电迁移可靠性问题.从电迁移理论出发，分析概括了铝互连电迁移问题的研究方法，总结了上世纪至今关于铝互连电迁移问题的主要经验；最后结合已知的结论和目前芯片制造业现状，分析了当前超深亚微米铝互连线电迁移可靠性挑战的原因和表现形式，提出了解决这些问题的总方向. 关键词： 电迁移 铝互连 微结构     

A microprocessor based autoscanner for electromigration studies in thin films

Mass transport due to electromigration can be estimated if the diffusion coefficientD and the electromigration effective charge numberZ* are known. Neutron activated tracer scanning method determine the radioactivity at different positions. An automatic scanning system for determining the radioactive concentration profiles developed using a microprocessor is described in this paper. Using the radioactive concentration profiles the electromigration shift is determined. From this shift the electromigration effective charge numberZ* is calculated. The system developed was tested for tin thin films.     

基于甲酸和氢氧化钠的衍生移动反应界面的数值计算与实验验证(英文)

在甲酸（α相）和氢氧化钠（γ相）缓冲液形成的移动反应界面的基础上,提出了一种衍生移动反应界面模型。模型表明在α相和γ相之间会形成一个新的β相,β相和α相形成衍生移动反应界面,β相和γ相形成移动界面。为了验证该模型的有效性,该文给出了相关理论及数值推导过程。此外,基于毛细管电泳和自制装置进行了相关实验。结果表明,若使用以前的移动反应界面,实验结果与理论计算存在较大误差,而采用该文提出的衍生移动反应界面,实验数据与理论计算结果高度一致。该文提出的衍生移动反应界面理论及模型对于电泳,特别是毛细管电泳中样品的分离与富集具有重要的意义。     

A new model for electromigration grain boundary noise based on free volume

Grain boundary plays a key role in electromigration process of polycrystal interconnection. We take a free volume to represent a 'vacancy--ion complex' as a function of grain boundary specific resistivity, and develop a new characterisation model for grain boundary noise. This model reveals the internal relation between the boundary scattering section and electromigration noise. Comparing the simulation result with our experimental result, we find the source as well as the form of noise change in the electromigration process. In order to describe the noise enhancement at grain boundary quantitatively, we propose a new parameter-grain boundary noise enhancement factor, which reflects that the grain boundary noise can characterise the electromigration damage sensitively.     

Electromigration revisited: competition between Kirkendall shift and backstress in pure metals and two-phase alloys

The simple phenomenological model and analytical approach of electromigration in the two-phase alloy (solder) under combined influence of the Kirkendall effect, backstress and sedimentation is presented. It is compared with electromigration in pure metal under condition of quasi-equilibrium vacancies (unlimited power of vacancy sinks-sources) and electromigration in pure metal with account of nonequilibrium vacancies.     

The cooperative effect of electromigration and non-equilibrium vacancies on reactive phase growth

Phase formation under a direct current was analysed for a binary system with non-equilibrium vacancy distribution. It was shown that the non-equilibrium vacancy distribution diminishes the effect of electromigration on the phase formation process: if the electric current augments the phase growth, the resulting vacancy concentration gradient delays it; if the current opposes phase growth, the vacancy concentration gradient maintains it. A comparative analysis is presented involving the results obtained within Gösele and Tu theory (taking into consideration the finiteness of the reaction rate at interfaces).