硅一体化薄膜微电极器件及其应用

提出用发展中的硅微机械加工技术设计制作硅一体化薄膜微电极器件．这类微电化学器件具有微电极所特有的全部优点，而且由于结构上的一体化，便于器件整体的微型化和集成化．试用薄膜微电极器件电流法常温直接检测ＣＯ２气体，取得了满意的结果。设想通过器件三维构型设计的改进和完善，器件工作的长期稳定性可望进一步提高．     

Role of Hydrodynamic Conditions in the Distribution of Anodic Dissolution Rates in Cavity Etching Regions during Electrochemical Micromachining of Partially Insulated Surfaces

Experimental study of the distribution of local rates of electrochemical micromachining in the presence of photoresist masks in various hydrodynamic conditions (macroscopically nonuniform rotating disk electrode, sprayer flow, an electrode placed into a cell with chaotic bulk electrolyte mixing) shows that the maximum etching localization is achieved at the control of the dissolution rate by the mass transport rate (at achieving the anodic limiting current). The localization enhancement as compared to the primary current distribution takes place in the case of a turbulent flow at hydrodynamic conditions where the removal of dissolution products from the undercutting region is hindered. These conditions (electrochemical reaction limited by the ion mass transport rate, high resistance to the mass transport in the undercutting region) are necessary for the localization enhancement using a pulsed anodic–cathodic treatment.     

Size-controlled flow synthesis of metal-organic frameworks crystals monitored by in-situ ultraviolet-visible absorption spectroscopy

Size-controlled flow synthesis of nanoporous particles are of considerable interest for future industrial applications,however,is facing challenges due to lack of in-situ method for size-characterization in fluidic environment.We present that ultraviolet-visible(UV-vis) absorption spectroscopy can be integrated into a flow-synthesis system which was produced by femtosecond laser micro machining.The shift of the absorption peak position of the ex-situ and in-situ UV-vis spectra correlates to variation of size of porous metal-organic frameworks crystals.ZIF-67 crystals with a size in the range from 200 nm to1025 nm are fabricated with the assistance of tri-ethylamine under monitoring of in-situ UV-vis spectra.The ZIF-67 crystals are converted into nanoporous carbons particles with controlled sizes.These materials show size-dependent performance in Na-ion battery and size-independent performance in metal/H_2 O seawater battery.     

Large‐acceptance diamond planar refractive lenses manufactured by laser cutting

For the first time, single‐crystal diamond planar refractive lenses have been fabricated by laser micromachining in 300 µm‐thick diamond plates which were grown by chemical vapour deposition. Linear lenses with apertures up to 1 mm and parabola apex radii up to 500 µm were manufactured and tested at the ESRF ID06 beamline. The large acceptance of these lenses allows them to be used as beam‐conditioning elements. Owing to the unsurpassed thermal properties of single‐crystal diamond, these lenses should be suitable to withstand the extreme flux densities expected at the planned fourth‐generation X‐ray sources.     

Characterization of microstructures induced in the workpiece of aluminum alloy by excimer laser micromachining

Excimer laser emitting at 248 nm is applied to produce microstructures on the surface of aluminum alloy. The surface morphology shows that hotspots and thermal fluidic structures both come to light. Two possible mechanisms of hotspots formation are proposed: near-field diffraction and interference, and extremely fast rapid thermal annealing. And for the formation of thermal fluidic pattern structure, a thin film model is applied.     

Analysis of nano channel formation in quartz cubes by laser-induced process

A novel laser processing technique was developed for making channels in the nano regime in this paper. A Nd:YAG laser was used to dry fabricate micro channels (25μm～100μm di ameter) in a 1 cm^3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are smooth and with extremely high aspect ratio (～10^4 depth to width ratio). A possible mechanism is proposed to explain the formation of the nano channels. This laser-based nano channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.     

Ablation of Transparent Materials Using Excimer Lasers for Photonic Applications

For many years, the development of effective ablation or laser machining techniques for making micro-optical components has been the key factor in the birth of new photonic devices and systems. In this article, the ablation characteristics of two types of the most important transparent materials, transparent polymers and glasses, are studied. Simple shaped microcavities are first machined for studying the fundamental ablation parameters, including threshold fluence, effective absorption coefficient, and ablation rate. In studying polymer ablation, five standard grades and five proprietary polymeric compounds are selected. Ablation techniques using these transparent polymers for making arrayed ferrules and curved microlenses are presented. Applications of these ablated microstructures for optical fiber connectors, optical fiber coupling and alignment, and transparent chip encapsulants, are introduced and demonstrated with emphasis on the quality of the ablated profiles and dimensions to satisfy the required performance. In glass ablation, borosilicate glasses are considered and their associated ablation behaviors are studied. The procedures to ablate glass-based arrayed microstructures with flat and curved surfaces are described. The utilizations of these arrayed microstructures for optical waveguide, wave absorber, and beam guider, are specifically discussed. Finally, concluding remakes for future trends are presented.     

飞秒激光精细加工含能材料

介绍了飞秒激光脉冲特点及其与物质相互作用机理, 论述了飞秒激光微加工含能材料技术特点及优势, 综述了飞秒激光加工含能材料技术及发展. 讨论了飞秒激光加工含能材料技术进一步发展所需的实验与理论研究工作以及相应的研究方案和关键技术. 关键词： 飞秒激光微加工 含能材料 冲击温度 冲击压强     

基于飞秒激光直写光纤光栅的掺镱光纤激光器

 利用飞秒激光微加工技术,可以在光纤纤芯内直写出布拉格光栅,它与传统的光纤光栅制作方法相比,具有耗时短、无需光敏光纤、周期可任意设定、光栅稳定性高等优点。采用800 nm钛宝石飞秒激光器,在Hi1060光纤内写入一支8 mm长的布拉格光栅,光纤光栅的周期为2.9 μm,这是中心波长为1 042 nm的八阶光纤布拉格光栅。将所得光栅与一段有源的双包层光纤熔接,作为激光输出镜,利用975 nm的LD光纤模块作为泵浦源,采用端泵浦技术构成双包层光纤激光器。双包层光纤采用Nufern公司镱(Yb³⁺)离子掺杂双包层光纤,光纤长度3 m。所得激光器的输出功率为71.1 W,中心波长1 042 nm,带宽约为0.8 nm。     

Femtosecond laser micromachined optical waveguides in LiTaO3 crystal

By using femtosecond laser micromachining, optical wave guides in both depressed cladding and dual‐line configurations have been produced in LiTaO₃ crystal. The guiding properties and the thermal stability have been investigated for both geometries, which exhibit different performance. Depressed cladding waveguides support guidance along both extraordinary and ordinary index polarizations, while dual‐line waveguides support only extraordinary index polarization. Thermal annealing has been proved to be an effective method to reduce the propagation losses. For the cladding waveguide, the lowest propagation loss was as low as 0.38 dB/cm after the annealing treatment at 400 °C. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)