Laser writing techniques for photomask fabrication using a femtosecond laser

Photomasks are the backbone of microfabrication industries. Currently they are fabricated by a lithographic process, which is very expensive and time consuming since it is a multi-step process. These issues can be addressed by fabricating photomasks by direct femtosecond laser writing, which is a single-step process and comparatively cheaper and faster than lithography. In this paper we discuss our investigations on the effect of two types of laser writing techniques, namely front- and rear-side laser writing, with regard to the feature size and the edge quality of a feature. It is proved conclusively that for the patterning of masks, front-side laser writing is a better technique than rear-side laser writing with regard to smaller feature size and better edge quality. Moreover the energy required for front-side laser writing is considerably lower than that for rear-side laser writing. Received: 22 May 2001 / Accepted: 14 September 2001 / Published online: 17 October 2001     

Near-barrier fusion reactions induced by α on197Au,193Ir,191Ir,185Re,181Ta,121Sb and69Ga nuclei

Fusion-evaporation cross-sections for the α-induced reactions upon¹⁹⁷Au,¹⁹³Ir,¹⁹¹Ir,¹⁸⁵Re,¹⁸¹Ta,¹²¹Sb and⁶⁹Ga nuclei at bombarding energies near the Coulomb barrier have been measured by off-line observation of the γ-rays emitted in the radioactive decay of the residual nuclei using stacked foil technique. The total fusion cross-section for the systems have been compared with simple statistical model calculations using the code ALICE/91 as well as with the coupled channel calculations that include the β₂ and ν₄ slatic deformations and dynamic couplings of the vibrational/rotational states of the target and the projet tile using the code CCDEF.     

Fabrication of Long-Period Fibre Gratings Using 800 nm Femtosecond Laser Pulses

Long-period fibre gratings inside standard single-mode optical communication fibres are successfully fabricated with infrared femtosecond laser pulses. The refractive index perturbations are well confined within the fibre core by choosing the proper laser focusing parameters and translation speed of the fibre during the direct laser writing process. With the self-focusing effect considered and at a constant average irradiation dose of 1.62 × 10^3 J/（cm^2μm）, the threshold intensity for fabricating long-period gratings with infrared femtosecond laser pulses is determined to be 5.13 × 10^13 W/cm2.     

Far-infrared signature of animal tissues characterized by terahertz time-domain spectroscopy

We present terahertz time-domain spectroscopy characterization of various animal tissues obtained from pork and rats. As the sensitivity of terahertz radiation to polar molecules of water is very high, biological tissues with high level of hydration show strong absorption at terahertz frequencies. The experimental data indicate that skin, fat and lean pork tissues have different frequency-dependent response to terahertz radiation due to the variation in water content. The same type tissue from different animals, however, is observed to show very similar water absorption.     

中间层Re的加入对覆膜钡钨阴极性能的改善

研究了一种新型的覆膜钡钨阴极——双层膜(Os-W/Re膜)钡钨阴极.对这种新型阴极的发射性能进行了测试，重点对其老炼前后表面薄膜的微观形貌进行了分析，表明中间层Re膜的加入使覆膜钡钨阴极的性能得到了改善.通过对Os-W双元合金膜钡钨阴极和Os-W/Re双层膜钡钨阴极发射特性的比较，发现Os-W/Re双层膜阴极的直流发射性能好于Os-W合金膜阴极.对两种阴极激活后发射表面的X射线光电子能谱分析表明，Os-W/Re双层膜阴极激活后表面形成的三元合金膜是其发射特性优于Os-W合金膜阴极的主要原因.应用扫描电子显微镜分析比较两种阴极激活老炼后的表面状态，结果表明：Os-W合金膜阴极在老炼一段时间后，其表面薄膜出现开裂，这会导致阴极发射均匀性下降；而Os-W/Re双层膜阴极在同样老炼条件下，发射表面薄膜均匀并保持完整，从而确保覆膜钡钨阴极发射均匀性和工作可靠性. 关键词： 双层膜钡钨阴极 Os-W/Re膜 Os-W膜 薄膜开裂     

SPM-induced spectral compression of picosecond pulses in a single-mode Yb-doped fiber amplifier

In a fiber amplifier, spectral compression due to self-phase modulation is demonstrated for ultrashort pulses. We report the generation of near-transform-limited picosecond pulses with peak powers of several kW at a repetition rate of 74 MHz and diffraction-limited beam quality in a Yb-doped fiber amplifier when seeding with a negative chirped pulse. Received: 17 September 2001 / Revised version: 22 November 2001 / Published online: 17 January 2002     

Compact Single-Stage Femtosecond Multipass Ti：Sapphire Amplifier at 1 kHz with High Beam Quality

A compact femtosecond Ti：sapphire amplifier system is reported using single-stage multipass configuration with high beam quality. A high dispersion glass stretcher and a pair of double prisms for compression are introduced based on broadband femtosecond seed pulses. The non-grating-based pulse stretcher and compressor are advantageous to increase high beam quality and to reduce the high-order dispersion. A Gaussian filter is used to reduce the gain narrowing effect in amplification. The compact femtosecond Ti：sapphire nine-pass amplifier delivers pulses with a duration of 26 fs and an energy of 800μJ at 7mJ pumping pulses energy at I kHz. The 1-kHz femtosecond amplifier with high beam quality and high stability is very suitable for ultrafast physics research applications, such as attosecond science, ultra-precision micromachining, and THz wave generation.     

Lifetime measurement of the ((11/2)−) isomer in 125Cs

A new rotational band has been observed in ¹⁶⁷Lu by ¹⁵²Sm (¹⁹F,4n)reaction at the HI-13 tandem accelerator of CIAE in Beijing. The high spin transition energies of the new band are almost identical to the triaxial superdeformed bands recently discovered in ¹⁶³Lu and ¹⁶⁵Lu. This new band is predicted as a triaxial superdeformed band by total routhian surface calculations. Received: 6 October 1997     

Rotational bands in 181Ta

High-spin states in ¹⁸¹Ta have been studied via the ¹⁷⁶Yb(¹¹B,α2n) reaction at 52 MeV using the PEX array and at 57 MeV using the NORDBALL array, with α-particle detection. The previously known, K^π=(7/2)⁺ ground state band and K^π=(9/2)⁻ band have been extended to spins (29/2)⁺ and (31/2)⁻, respectively. Two new one-quasiparticle bands, the K^π=(5/2)⁺ band built on the known (5/2)⁺ isomer and a K^π=((1/2)⁻) band have been observed. Two other rotational bands with three-quasiparticle structure, K^π=(15/2)⁻ and ((19/2)⁺ with π(7/2)[404]ν²(1/2)[510](9/2)[624] and π(9/2)[514]ν²(1/2)[510](9/2)[624] configurations, respectively, have been newly observed. The half-life of the K^π=((19/2)⁺) bandhead which decays to the head of the (15/2)⁻ band has been measured to be 140(36) ns. However, transitions from the ((19/2)⁺) state to the (15/2)⁻ band have not been observed. Received: 26 August 1998     

Synchronized picosecond pulse generation with a synchronously pumped dye laser and a compressed Nd: YAG laser for non-degenerate transient grating experiments

We have set up a laser system which simultaneously provides synchronized picosecond pulses in the visible and at a wavelength of 1.06 m with a repetition rate of 76 MHz. The set-up consists of a dye laser synchronously pumped by the second harmonic of a cw mode-locked Nd:YAG laser and a fiber-grating compressor for the fundamental wavelength of the Nd;YAG laser. Crosscorrelation measurments reveal the time jitter between the two pulse trains to be less than 10 ps. As a first application we have performed non-degenerate transient grating experiments in semiconductors. The non-degenerate technique allows to use excitation energies well above the bandgap energy and to separate non-linear refractive index effects from photoinduced absorption or transmission changes.