A Movable Mass Spectroscopy Sampling Apparatus for Measuring Spatial Distribution of Neutral Radicals in Silane Plasma

A movable mass spectroscopy gas sampling apparatus has been established and a straight-line fit of silane depletion fraction f is proposed. The spatial density distributions of SiHn (n=0-3) radicals in silane radio frequency glow discharge have been measured by a mass spectrometer. The experimental results demonstrate that the densities of the neutral radicals have the peak value near the middle position of electrodes, and the densities of SiH2 and SiH3 are higher than those of Si and SiH in silane plasma. This reveals that SiH2 and SiH3 may be the primary precursors in forming the a-Si:H film.     

利用力－电类比方法研究力矩激励器

本文将力－电类比方法推广到转动自由度，建立了力矩激励器和它的校正系统的类比电路图，并从实验上验证了该类比电路的正确性，为优化力矩激励器的设计提供了依据。     

Ca2SnO4∶Tb3+绿色荧光粉的制备及光致发光研究

采用高温固相法合成了Ca2 SnO4∶Tb3+绿色荧光粉.利用X射线衍射分析了Ca2 SnO4∶Tb3+物相的形成.测量了Ca2 SnO4∶Tb3+的激发和发射光谱,激发光谱由一个宽激发峰组成,研究了Tb3+浓度对样品激发光谱的影响,结果显示,随Tb3+浓度增大,宽带激发峰发生了红移.发射光谱由四个主要发射峰组成,峰值分别位于491,543,588和623 nm处,Tb3+以5 D4-7 F5(543 nm)跃迁发射最强,低掺杂浓度下,Tb3+的7 F6能级出现斯托克劈裂,劈裂峰(481 nm处)随Tb3+浓度增加,先增强然后减弱;在发光强度方面,随Tb3+浓度的增大呈现先增大后减小的趋势,当Tb3+摩尔浓度为9％时,发光强度最大,根据Dexter理论,确定了在Ca2 SnO4基质中Tb3+自身浓度猝灭机理.荧光寿命测试表明Tb3+在Ca2 SnO4基质中荧光衰减平均寿命为4.4 ms.     

用SiCl4/H2气源沉积多晶硅薄膜光照稳定性的研究

对以SiH₄/H₂及SiCl₄/H₂为源气体、采用 等离子体增强化学气相沉积技术制备的非晶硅薄膜和多晶硅薄膜进行了光照稳定性的研究.实验表明，制备的多晶硅薄膜并没有出现 非晶硅中的光致衰减现象，其光电导、暗电导在光照过程中没有下降反而有所上升且电导率 变化快慢受氢稀释度的制约.多晶硅薄膜的光照稳定性可能来源于高的晶化度及Cl元素的存在. 关键词： 多晶硅薄膜 稳恒光电导效应 晶界 光致衰退效应     

汉语单音语音的频谱分析实验

介绍了一个用频谱分析的方法对汉语单音语音进行分析的实验。通过对不同发声人对同一汉字的发音进行频谱分析 ,得出其相应的频谱特性或变化规律。     

共轴球面腔稳定性条件公式的推导

利用矩阵的特征值概念对共轴球面腔稳定性条件进行了推导，所推结果与文献结论一致．     

Spatial distribution of electron characteristic in argon rf glow discharges

The spatial distributions of the electron density and the mean electron energy of argon radio frequency （rf） glow discharge plasma in a plasma-enhanced chemical vapour deposition （PECVD） system have been investigated using an established movable Langmuir probe. The results indicate that in the axial direction the electron density tends to peak at midway between the two electrodes while the axial variation trend of mean electron energy is different from that of the electron density, the mean electron energy is high near the electrodes. And the mean electron energy near the cathode is much higher than that near the anode. This article focuses on the radial distribution of electron density and mean electron energy. A proposed theoretical model distribution agrees well with the experimental one： the electron density and the mean electron energy both increase from the centre of the glow to the edge of electrodes. This is useful for better understanding the discharge mechanism and searching for a better deposition condition to improve thin film quality.     

用SiCl4/H2气源沉积多晶硅薄膜光照稳定性的研究

对以SiH4/H2及SiCl4/H2为源气体、采用等离子体增强化学气相沉积技术制备的非晶硅薄膜和多晶硅薄膜进行了光照稳定性的研究.实验表明,制备的多晶硅薄膜并没有出现非晶硅中的光致衰减现象,其光电导、暗电导在光照过程中没有下降反而有所上升且电导率变化快慢受氢稀释度的制约.多晶硅薄膜的光照稳定性可能来源于高的晶化度及Cl元素的存在.     

Ca_2SnO_4:Tb~(3+)绿色荧光粉的制备及光致发光研究

采用高温固相法合成了Ca2SnO4∶Tb3+绿色荧光粉。利用X射线衍射分析了Ca2SnO4∶Tb3+物相的形成。测量了Ca2SnO4∶Tb3+的激发和发射光谱,激发光谱由一个宽激发峰组成,研究了Tb3+浓度对样品激发光谱的影响,结果显示,随Tb3+浓度增大,宽带激发峰发生了红移。发射光谱由四个主要发射峰组成,峰值分别位于491,543,588和623nm处,Tb3+以5 D4—7 F5(543nm)跃迁发射最强,低掺杂浓度下,Tb3+的7 F6能级出现斯托克劈裂,劈裂峰(481nm处)随Tb3+浓度增加,先增强然后减弱;在发光强度方面,随Tb3+浓度的增大呈现先增大后减小的趋势,当Tb3+摩尔浓度为9%时,发光强度最大,根据Dexter理论,确定了在Ca2SnO4基质中Tb3+自身浓度猝灭机理。荧光寿命测试表明Tb3+在Ca2SnO4基质中荧光衰减平均寿命为4.4ms。