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采用射频磁控溅射法在氮化硅衬底上沉积纳米VOx薄膜,利用X射线衍射、原子力显微镜分别对薄膜的结晶形态及表面形貌进行表征.研究了纳米VOx薄膜在空气中长时间暴露后的方块电阻、热滞回线等电学特性的变化情况,并分析这些变化给器件带来的影响.利用X射线光电子能谱仪、傅里叶变换红外光谱仪分析对比新制与久置薄膜的组分及分子结构差异.研究表明,暴露在空气中的纳米VOx薄膜方块电阻增大是因为低价钒离子被吸附氧原子氧
关键词:
x薄膜')" href="#">纳米VOx薄膜
磁控溅射
电学特性
退化 相似文献
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Study of nanocrystalline VO2 thin films prepared by magnetron sputtering and post-oxidation 下载免费PDF全文
Nanocrystalline VO2 thin films were deposited onto glass slides by direct current magnetron sputtering and postoxidation. These films undergo semiconductor-metal transition at 70°C, accompanied by a resistance drop of two magnitude orders. The crystal structures and surface morphologies of the VO2 films were characterized by x-ray diffraction (XRD) and atomic force microscope (AFM), respectively. Results reveal that the average grain size of VO2 nanograins measured by XRD is smaller than those measured by AFM. In addition, Raman characterization indicates that stoichiometric VO2 and oxygen-rich VO2 phases coexist in the films, which is supported by x-ray photoelectron spectroscopy (XPS) results. Finally, the optical properties of the VO2 films in UV-visible range were also evaluated. The optical band gap corresponding to 2p-3d inter-band transition was deduced according to the transmission and reflection spectra. And the deduced value, E opt2p-3d = 1.81 eV, is in good agreement with that previously obtained by theoretical calculation. 相似文献
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广泛应用于非相对论量子力学的费曼-海尔曼定理被推广到相对论二体波动方程并由此得到了计算介子质量的理论公式.分析表明本文所考虑的两种波动方程不能很好地描述夸克偶素的短程相互作用. 相似文献
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利用能量依赖的夸克-反夸克间自旋-自旋作用势建立了介子超精细质量劈裂公式。数据分析表明该公式能统一描述基态和激发态、同位旋为零及非零介子的超精细质量劈裂。 相似文献
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The influences of lower-level coherence in atomic medium of Ξ-type energy-level scheme on the absorption and dispersion are studied in dressed states. It is found that a weak probe light of a certain fre-quency can be free of atomic absorption, and at the same time has a large index of refraction. 相似文献
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基于修正的Van-Vleck Weisskopf线型、辐射传输色散理论和水汽连续体吸收模型,结合HITRAN数据库,建立了太赫兹波大气传输衰减模型——VVWH,形成了对宽频太赫兹波在真实大气中水平传输衰减的数值模拟能力。同时对太赫兹时域光谱技术(THz-TDS)获取的透射光谱实测数据进行了对比分析。计算结果与实验结果总体变化趋势一致,在吸收谱线处两者吻合良好,但在低频的大气窗口区,实验结果相比计算呈现出更强的传输衰减。考察了相对湿度对太赫兹波大气传输衰减特性的影响变化。 相似文献