FABRICATION AND APPLICATION OF NEAR-FIELD OPTICAL FIBRE PROBE

In this paper, the fabrication of a large cone angle near-field optical fibre probe, using the two-step chemical etching method and bent probe, is introduced, and the controlling parameters of the coated Cr－Al film at the probe tip are presented. The scanning electron microscopy images display that the tip diameter of the uncoated large cone angle fibre probe obtained is less than 50nm, the cone angle over 90°, and the diameter of light aperture at the coated probe tip is less than 100nm. The measured results of the optical transmission efficiency for various probe tips show that the uncoated straight optical fibre probe, film-coated straight probe and film-coated bent probe are 3×10^-1, 2×10^-3, and 1×10^-4 times that of the flat fibre probe, respectively. In addition, the force images and near-field optical images of a standard sample are acquired using a large cone angle and film-coated bent probe.     

动态化学腐蚀法制备大锥角近场光纤探针

基于液压传递原理,设计出一种用动态化学腐蚀法制备大锥角近场光纤探针的装置.实验结果表明,在传统的化学腐蚀法制备光纤探针的过程中,通过控制腐蚀液液面的上升速度,可以有效地控制探针针尖的形状以及锥角的大小.在此基础上,还论述了分步控制光纤与腐蚀液液面的相对位移的方法在大锥角光纤探针的制备中所具有的独特优越性.利用所制备的大锥角近场光纤探针在扫描近场光学显微镜上对直径为200nm的小球进行探测,其力学像证实该探针具有较高的形貌分辨率(约为50nm). 关键词： 动态化学腐蚀法 大锥角 近场光纤探针