基于热学理论的微型真空检测器件的研究

介绍了一种基于热学知识设计的表面薄膜微型MEMS皮拉尼计,并将其用于圆片级真空封装腔体的真空度测量中。为了设计灵敏度较高的皮拉尼计,对不同结构的皮拉尼计的热量分布进行了数值计算与分析,并最终完成了加工。此皮拉尼计的结构和加工工艺比较简单,能用于一般的MEMS真空封装中。实验结果显示该皮拉尼计可以测量1-10^5Pa的真...     

Finite element analysis on stress-induced birefringence of polarization-maintaining optical fiber

Influence of thermal-mechanical properties on the features of the panda polarization-maintaining optical fiber (PMF-) in fabrication process is studied in detail by finite element method (FEM). The stress birefringence is 2.13443×10-4 obtained by the static analysis and 2.1269×10-4 by dynamic analysis. The difference in simulation by two methods is around 0.4%. The non-uniformity of stress birefringence in the fiber core is about 1.6%. Predicted results demonstrate that effect of the thermal conductive parameter on fiber thermal stress dominates. The high and uniform stress birefringence in the fiber core is obtained by appropriately selecting suitable stress region area and position.