Deposition of ZnO Films on Freestanding CVD Thick Diamond Films

For ZnO/diamond structured surface acoustic wave （SAW） filters, performance is sensitively dependent on the quality of the ZnO films. In this paper, we prepare highly-oriented and fine grained polycrystalline ZnO thin films with excellent surface smoothness on the smooth nucleation surfaces of freestanding CVD diamond films by metal organic chemical vapour deposition （MOCVD）. The properties of the ZnO films are characterized by x-ray diffraction （XRD）, scanning electron microscopy （SEM）, and photoluminescence （PL） spectrum. The influences of the deposition conditions on the quality of ZnO films are discussed briefly. ZnO/freestanding thick-diamond-film layered SAW devices with high response frequencies are expected to be developed.     

ZnO:Al透明导电薄膜的制备及其特性分析

采用射频磁控溅射工艺在玻璃衬底上制备出c轴择优取向的ZnO:A l(AZO)透明导电薄膜,靶材为AZO(2%质量分数A l2O3)陶瓷靶。对在不同溅射功率下沉积出来的薄膜运用X射线衍射(XRD)、可见光区透射谱、四探针方法分别进行结构和光电特性的表征。得出在200W下沉积的膜性能最好,可见光区平均透过率达到89%以上,电阻率最低为9.3×10-4Ω.cm。