排序方式: 共有36条查询结果,搜索用时 15 毫秒
1.
2.
采用分子动力学(MD)模拟研究了离子束辅助沉积(1BAD)生长类金刚石(DLC)膜的物理过程.分 别选C2分子和Ar离子作为沉积源和辅助沉积粒子.改变Ar的入射能量和到达比(A r/C),研 究了它对DLC膜结构的影响.重点讨论了Ar辅助沉积引起表面原子的瞬间活性变化对薄膜结构 产生的影响.分析表明,由于Ar离子的轰击引起的能量和动量的传递,大大地增强了C原子在 表面的反冲动能及迁移概率,增加了合成薄膜的SP3键含量.研究结果和实验 观察一致,并从合成机理上给出了一些定量解释.
关键词:
类金刚石膜
离子束辅助沉积
分子动力学模拟 相似文献
3.
4.
5.
6.
Using the molecular dynamics method, the stability of small He-vacancy clusters is studied under the condition of the high He and low vacancy densities. The result shows that there is a competition between He atoms detrapped and self-interstitial atoms (SIAs) emitted during the clustering of He atoms. When the He number is above a critical value of 9, the SIA emission is predominant. The SIA emission can result in deep capture of He atoms since the binding energy of He to a He-vacancy cluster is increased with the number of SIAs created. The cluster thus grows up. In addition, more SIAs are created when the temperature is elevated. The average volume of a He atom is increased. The cluster expansion takes place at high temperature. 相似文献
7.
用分子动力学模拟研究能量为1 keV/atom的Au原子簇和0.2keV/atom的Al原子簇轰击金薄膜产生的级联碰撞。分子动力学模拟结果表明,原子簇轰击后,靶原子的反冲能谱加宽。与同样速度的单原子轰击比较,最大反冲能较后者高2—5倍。原子簇轰击后的多次碰撞及运动原子间的碰撞增加了靶原子的反冲能。还用经典力学守恒定律分析了两个碰撞的运动原子间的能量转移。 相似文献
8.
用分子动力学模拟研究能量为1keV/atom的Au原子簇和0.2keV/atom的Al原子簇轰击金薄膜产生的级联碰撞。分子动力学模拟结果表明,原子簇轰击后,靶原子的反冲能谱加宽。与同样速度的单原子轰击比较,最大反冲能较后者高2—5倍。原子簇轰击后的多次碰撞及运动原子间的碰撞增加了靶原子的反冲能。还用经典力学守恒定律分析了两个碰撞的运动原子间的能量转移。
关键词: 相似文献
9.
MONTE CARLO STUDIES OF RADIATION DAMAGE INDUCED BY FUSION:DYNAMIC SIMULATION OF SPUTTERING 下载免费PDF全文
In this paper, the sputtering caused by fusion of 4He particles in the first wall materials is investigated by using the dynamic Monte Carlo simulation, which is based on the binary collision approximation. The dependences of sputtering yields on the incident energy and angle, as well as the comparisons of results calculated using the Monte Carlo methed with results from experiments, are discussed. Energy spectrum and angular distributions of sputtered species, the depth of origin of the sputtered particles as well as range distributions of incident ions are given. From a comparison between the related experimental data and the calculated results with static and dynamic simulation it has been found that a better agreement is obtained for dynamic simulation. 相似文献
10.