数字图像相关曲面拟合法相关系数修正算法的实验研究

为了提高数字图像相关曲面拟合法亚像素定位精度,经研究发现,在实际应用中,曲面拟合法在亚像素位移为0.5像素左右时会发生较大的波动,与实际亚像素位移发生一定偏离,导致此位置位移的不连续。本文通过分析曲面拟合法亚像素位移偏离真实位移的原因,给出了具体修正方法,用模拟平移实验讨论了修正系数k和子区大小对修正结果的影响,用三点弯曲实验验证了修正方法在复杂变形情况下的有效性,提高了曲面拟合法在实际应用中的测量精度。     

Conditions for laser-induced plasma to effectively remove nano-particles on silicon surfaces

Particles can be removed from a silicon surface by means of irradiation and a laser plasma shock wave.The particles and silicon are heated by the irradiation and they will expand differently due to their different expansion coefficients,making the particles easier to be removed.Laser plasma can ionize and even vaporize particles more significantly than an incident laser and,therefore,it can remove the particles more efficiently.The laser plasma shock wave plays a dominant role in removing particles,which is attributed to its strong burst force.The pressure of the laser plasma shock wave is determined by the laser pulse energy and the gap between the focus of laser and substrate surface.In order to obtain the working conditions for particle removal,the removal mechanism,as well as the temporal and spatial characteristics of velocity,propagation distance and pressure of shock wave have been researched.On the basis of our results,the conditions for nano-particle removal are achieved.