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针对传统接触式曝光过程中掩模版因自身重力产生形变从而引入不可忽视的线宽误差和位置误差的问题,提出了一种大口径石英基底衍射透镜的高精度制备方法.采用背面具有真空道的高平面度、高强度金属校正工装吸附在掩模版上,利用掩模版上下表面的压强差使其与工装高度贴合,确保掩模版的高平面度.待石英基底所有区域均与掩模版结构面紧密贴合后取下工装.完成接触式曝光和显影后,采用反应离子刻蚀技术对大口径石英基底进行刻蚀,最终得到高精度微纳米结构.经有限元分析,使用该校正工装后,掩模版的形变量由28.85μm减小为0.88μm.实验结果表明,采用该方法制备的口径430mm两台阶石英基底菲涅尔衍射透镜波像差优于1/25λ,平均衍射效率为38.24%,达到理论值的94.35%,具有良好的聚焦和光学成像效果. 相似文献
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光散射检测微粒直径分布的实验装置的研制 总被引:1,自引:0,他引:1
论述光散射检测微粒直径分布的实验装置的原理及其设计,并给出装置的实验结果。 相似文献
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The solubilities of Yb(ClO4)3·3H2O-18C6-C2H5OH ternary system at 25 were invstigated by a semimicro method for study of phase equilibrium.and the refractive indexes of saturated solutions were determined.The behavior of water in this system during the equilibrium was examined.The results indicate that there are two kinds of complexes formed in the system, their chemical compositions are: Yb(ClO4)3·18C6·3H2O·2C2H5OH (I) and Yb(ClO4)3 18C6·3H2O·C2H5OH.Both are incongruently soluble in EtOH.The influences of rare earth ions and salt anions on formation of complexes were discussed.The two solid complexes have been prepared, and their composihons and properties have been investigated by chemical analysis, IR, DTG and DSC.According to the DSC, the enthalpies of some steps during the decomposition have been obtained for complexes (Ⅲ)and (Ⅳ). 相似文献
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