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Theoretical study of electromechanical property in a p-type silicon nanoplate for mechanical sensors 下载免费PDF全文
Electromechanical property of a p-type single-crystal silicon nanoplate is modelled by a microscopic approach where the hole quantization effect and the spin-orbit coupling effect are taken into account. The visible anisotropic subband structures are calculated by solving self-consistently the stress-dependent 6×6 k.p Schrodinger equation with the Poisson equation. The strong mixing among heavy, light, and split-off holes is quantitatively assessed. The influences of the thickness and the temperature on the piezoresistive coefficient are quantitatively investigated by using the hole concentrations and the effective masses from the complex dispersion structure of the valence band with and without stresses. Our results show that the stress determines the extent to which the band is mixed. The hole quantization effect increases as the thickness decreases, and therefore the valence band is strongly reshaped, resulting in the size-dependent piezoresistivity of the silicon nanoplate. The piezoresistive coefficient increases almost 4 times as the thickness reduces from the bulk to 3 nm, exhibiting a promising application in mechanical sensors. 相似文献
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提出一种用于分析硅纳米梁动态特性的改良型半连续体模型,对比传统的连续体理论,这种新模型使用了Keating势,并考虑了纳米梁在宽厚两个维度的分立特性。依据Sun-Zhang模型思想和能量守恒定律,建立了改良型Keating模型,并进行了双端固支梁的基频计算。在这个过程中,对一些表面效应也进行系统分析。结果表明,该改良模型一方面在纳米尺度下与Material StudioTM软件仿真结果较为符合,另一方面也能在微观尺度下较好的接近连续体模型的计算数据。同时,该模型还反映了基频随纳米梁宽度变化的特性,这也符合一些实际实验。 相似文献
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A semi-continuum approach is developed to describe the effect of (2 ×1) surface reconstruction on the elastic modulus of the silicon nano-plate. Young's moduli of a (001) silicon nano-plate along the high-symmetry [100] direction are obtained with and without considering (2 × 1) surface reconstruction. The approach predicts that the nano-plate with unreconstructed (001) surface is elastically softer than the bulk while it exhibits the opposite behaviour with (2 × 1) reconstructed surface. On the (001) surface, the (2 × 1) reconstructed surface dominates the plate as the thickness of the plate scaling decreases to several tens of nanometre. Whether the nano-plate is softer or stiffer depends on bond loss, bond saturation and direction of bond alignment, which have major impacts on the mechanics of the nano-plate. 相似文献
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提出一种用于分析硅纳米梁动态特性的改良型半连续体模型,对比传统的连续体理论,这种新模型使用了Keating势,并考虑了纳米梁在宽厚两个维度的分立特性。依据Sun-Zhang模型思想和能量守恒定律,建立了改良型Keating模型,并进行了双端固支梁的基频计算。在这个过程中,对一些表面效应也进行系统分析。结果表明,该改良模型一方面在纳米尺度下与Material StudioTM软件仿真结果较为符合,另一方面也能在微观尺度下较好的接近连续体模型的计算数据。同时,该模型还反映了基频随纳米梁宽度变化的特性,这也符合一些实际实验。 相似文献
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